Kyushu Institute of Technology Academic Repository
Kyutacarは九州工業大学で生産された研究成果を オープンアクセスで提供する機関リポジトリシステムです。 Kyutacar is open-access repository of research by members of the Kyushu Institute of Technology.
Department of Electrical Engineering, Kyushu Institute of Technology
Department of Electrical Engineering, Kyushu Institute of Technology
Department of Electrical Engineering, Kyushu Institute of Technology
Center for Interdisciplinary Research, Tohoku University
Center for Interdisciplinary Research, Tohoku University
抄録
The abstraction reaction of D adatoms by H atoms have been investigated on the Si(1 1 0) surfaces. The direct abstraction to form HD molecules obeys a second-order rate law in D coverage θD. On the other hand, the indirect abstraction to form D2 molecules obeys a fourth-order rate law in θD. In addition to the direct abstraction, indirect abstraction to form HD molecules is also included due to piled H adatoms during H exposure. It is found that the indirect abstraction is promoted on the surfaces saturated with dideuterides, suggesting that dideuterides (dihydrides) play a significant role in the indirect abstraction paths. The kinetics of the abstraction reactions on the Si(1 1 0) surfaces look similar to those on the Si(1 0 0) surface. However, the delayed D2 desorption exhibits time profiles different from those on the Si(1 0 0) surfaces.
Adsorption and abstraction of atomic hydrogen on the Si(110) surfaces
Adsorption.pdf
(1.37MB)
