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長ストロークと高精度位置決めを両立する連係微動(連続ステップ位置決めへの適用)
http://hdl.handle.net/10228/5395
http://hdl.handle.net/10228/5395dfb64358-7237-40f2-9e46-64b6df504d9c
名前 / ファイル | ライセンス | アクション |
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77_2139.pdf (357.8 kB)
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Item type | 学術雑誌論文 = Journal Article(1) | |||||||||||
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公開日 | 2015-06-15 | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
タイトル | ||||||||||||
タイトル | 長ストロークと高精度位置決めを両立する連係微動(連続ステップ位置決めへの適用) | |||||||||||
その他のタイトル | ||||||||||||
その他のタイトル | Cooperated Positioning Control for Ultraprecision Positioning in Extended Stroke Path(Applied to Continuous Step Positioning) | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
著者 |
田丸, 雄摩
× 田丸, 雄摩
WEKO
6753
× 高藤, 和樹 |
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抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | Cooperative positioning is a positioning technique in which long stroke paths and ultraprecision positioning are combined. These are achieved simultaneously in a single apparatus using extended displacement positioning (EDP) and reduced displacement positioning (RDP), respectively. In the present study, we developed a new control program for a 2-stage hinged cooperative positioning device. RDP is first carried out by a series of step motions of the fine positioning stage. The extended displacement stage is then moved using EDP by an amount equal to the total displacement achieved by RDP. Simultaneously, the fine positioning stage is returned to its initial position using RDP. Continuous step positioning then becomes possible by repeating these operations. The maximum stroke was 67.1 µm and a settling range of less than the EDP displacement resolution (27 nm) was achieved. Some positioning errors were found to occur due to switching between the two types of operation. However, these could be reduced by increasing the EDP control coefficient to improve synchronization, or by decreasing the number of positioning steps. In this way, the amount of overshoot and the settling time could be effectively controlled. Using this apparatus, it was shown that continuous positioning with 25 nm steps was possible. | |||||||||||
書誌情報 |
日本機械学會論文集. C編 巻 77, 号 777, p. 2139-2145, 発行日 2011-05-25 |
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出版社 | ||||||||||||
出版者 | 社団法人日本機械学会 | |||||||||||
DOI | ||||||||||||
関連タイプ | isIdenticalTo | |||||||||||
識別子タイプ | DOI | |||||||||||
関連識別子 | http://doi.org/10.1299/kikaic.77.2139 | |||||||||||
NCID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AN00187463 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | ISSN | |||||||||||
収録物識別子 | 1884-8354 | |||||||||||
著作権関連情報 | ||||||||||||
権利情報 | 社団法人日本機械学会 | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Ultraprecision Positioning | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Macine Element | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Actuator | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Piezo-Element | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Compatible Positioning Unit | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Cooperated Positioning Control | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Lever Mechanism | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Elastic Hinge | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Continuous Step Positioning | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
査読の有無 | ||||||||||||
値 | yes | |||||||||||
研究者情報 | ||||||||||||
https://hyokadb02.jimu.kyutech.ac.jp/html/33_ja.html | ||||||||||||
連携ID | ||||||||||||
5113 | ||||||||||||
資料タイプ | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | Journal Article | |||||||||||
著者別名 | ||||||||||||
姓名 | Tamaru, Yuuma | |||||||||||
言語 | en | |||||||||||
姓名 | 田丸, 雄摩 | |||||||||||
言語 | ja | |||||||||||
姓名 | タマル, ユウマ | |||||||||||
言語 | ja-Kana | |||||||||||
著者別名 | ||||||||||||
姓名 | Takafuji, Kazuki | |||||||||||
著者所属 | ||||||||||||
九州工業大学大学院工学研究院 | ||||||||||||
著者所属 | ||||||||||||
九州工業大学大学院工学研究院 |