Kyushu Institute of Technology Academic Repository
Kyutacarは九州工業大学で生産された研究成果を オープンアクセスで提供する機関リポジトリシステムです。 Kyutacar is open-access repository of research by members of the Kyushu Institute of Technology.
WPI-MANA, National Institute for Materials Science/ Graduate School of Pure and Applied Sciences, University of Tsukuba
WPI-MANA, National Institute for Materials Science/ Graduate School of Pure and Applied Sciences, University of Tsukuba
WPI-MANA, National Institute for Materials Science/ Graduate School of Engineering, Kyushu Institute of Technology
WPI-MANA, National Institute for Materials Science
WPI-MANA, National Institute for Materials Science/ Graduate School of Pure and Applied Sciences, University of Tsukuba
抄録
We fabricated ionic-liquid-gated field-effect transistors on the hydrogen-terminated (111)-oriented surface of undoped silicon. Ion implantation underneath electrodes leads to good ohmic contacts, which persist at low temperatures down to 1.4 K. The sheet resistance of the channel decreases by more than five orders of magnitude as the gate voltage is changed from 0 to −1.6 V at 220 K. This is caused by the accumulation of hole carriers. The sheet resistance shows thermally activated behavior at temperatures below 10 K, which is attributed to hopping transport of the carriers. The activation energy decreases towards zero with increasing carrier density, suggesting the approach to an insulator–metal transition. We also report the variation of device characteristics induced by repeated sweeps of the gate voltage.