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一次差分信号とバギングCAN2を用いるモデル切り替え型予測制御によるRCA洗浄液の温度制御
http://hdl.handle.net/10228/00006173
http://hdl.handle.net/10228/000061731de83e35-8901-4606-8c97-55a4448595ad
名前 / ファイル | ライセンス | アクション |
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TSICE45_305.pdf (923.8 kB)
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Item type | 学術雑誌論文 = Journal Article(1) | |||||
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公開日 | 2017-05-08 | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
タイトル | ||||||
タイトル | 一次差分信号とバギングCAN2を用いるモデル切り替え型予測制御によるRCA洗浄液の温度制御 | |||||
その他のタイトル | ||||||
その他のタイトル | Temperature Control of RCA Cleaning Solutions via Model Switching Predictive Control Using First-difference Signals and Bagging CAN2 | |||||
言語 | ||||||
言語 | jpn | |||||
著者 |
黒木, 秀一
× 黒木, 秀一× 越山, 陽平× 湯野, 洋司 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The RCA cleaning method is the industry standard way for cleaning silicon wafers, and the temperature control is important for a stable cleaning performance. However, the difficulty lies in the fact that the RCA solutions cause nonlinear and time-varying exothermic chemical reactions. So far, the MSPC (model switching predictive controller) using the CAN2 (competitive associative net 2) has been developed and the effectiveness has been validated. However, we have observed that the control performance, such as the settling time and the overshoot, does not always improve with the increase of the number of learning iterations for the CAN2. To solve this problem, we introduce the bagging method for the CAN2 and first-difference signals for effectively embedding the bagging method. The effectiveness and the performance of the present method are examined by means of numerical experiments. | |||||
書誌情報 |
計測自動制御学会論文集 巻 45, 号 6, p. 305-312, 発行日 2009-06-30 |
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出版社 | ||||||
出版者 | 公益社団法人計測自動制御学会 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.9746/sicetr.45.305 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00072392 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0453-4654 | |||||
著作権関連情報 | ||||||
権利情報 | Copyright (c) 2009 SICE | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | temperature control of RCA cleaning solutions | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | first-difference signals | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | bagging competitive associative net | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | piecewise linear approximation of nonlinear and time-varying system | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
査読の有無 | ||||||
値 | yes | |||||
連携ID | ||||||
898 | ||||||
資料タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | Journal Article | |||||
著者別名 | ||||||
姓名 | Fujimoto, Akiko | |||||
言語 | en | |||||
姓名 | 藤本, 晶子 | |||||
言語 | ja | |||||
姓名 | フジモト, アキコ | |||||
言語 | ja-Kana | |||||
著者別名 | ||||||
姓名 | Koshiyama, Yohei | |||||
著者別名 | ||||||
姓名 | Yuno, Hiroshi | |||||
著者所属 | ||||||
九州工業大学大学院工学研究院 | ||||||
著者所属 | ||||||
九州工業大学大学院工学府 | ||||||
著者所属 | ||||||
九州工業大学大学院工学府 | ||||||
情報源 | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.9746/sicetr.45.305 | |||||
関連名称 | https://doi.org/10.9746/sicetr.45.305 |