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Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems
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coupled_problems_2015_p.1023.pdf (772.4 kB)
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Item type | 会議発表論文 = Conference Paper(1) | |||||||||||||||||||||||||||||
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公開日 | 2020-04-06 | |||||||||||||||||||||||||||||
資源タイプ | ||||||||||||||||||||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||||||||||||||||||||||||||
資源タイプ | conference paper | |||||||||||||||||||||||||||||
タイトル | ||||||||||||||||||||||||||||||
タイトル | Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems | |||||||||||||||||||||||||||||
その他のタイトル | ||||||||||||||||||||||||||||||
その他のタイトル | FINITE ELEMENT ANALYSIS USING A HIERARCHAL DECOMPOSITION FOR THE INTERACTION OF STRUCTURE, FLUID AND ELECTROSTATIC FIELD IN MEMS | |||||||||||||||||||||||||||||
言語 | ||||||||||||||||||||||||||||||
言語 | eng | |||||||||||||||||||||||||||||
著者 |
石原, 大輔
× 石原, 大輔
WEKO
6646
× 堀江, 知義
WEKO
799
× 二保, 知也
WEKO
1344
× 馬場, 昭好
WEKO
16208
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抄録 | ||||||||||||||||||||||||||||||
内容記述タイプ | Abstract | |||||||||||||||||||||||||||||
内容記述 | In this study, a hierarchal decomposition for the interaction of the structure, fluid and electrostatic field or the structure-fluid-electrostatic interaction, which is one of typical phenomena in micro-electro-mechanical system (MEMS), is proposed in order to solve it efficiently. The proposed decomposition partitions the structure-fluid-electrostatic interaction into the fluid-structure interaction (FSI) and the electrostatic field, and, moreover, splits the FSI into the velocity and fluid pressure fields. In this way, the whole interaction system is decomposed into the three fields in a hierarchal way. The proposed decomposition is implemented using a finite element method and is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparison among the results for the structure-fluid-electrostatic interaction, the FSI and the experiment that the proposed method taking into account the full-interaction can predict the vibration characteristic of the MEMS accurately. | |||||||||||||||||||||||||||||
備考 | ||||||||||||||||||||||||||||||
内容記述タイプ | Other | |||||||||||||||||||||||||||||
内容記述 | Ⅵ International Conference on Computational Methods for Coupled Problems in Science and Engineering (COUPLED PROBLEMS 2015), 18 - 20 May, 2015, Venice, Italy | |||||||||||||||||||||||||||||
書誌情報 |
Proceedings of the VI International Conference on Coupled Problems in Science and Engineering p. 1023-1028, 発行日 2015-04-01 |
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出版社 | ||||||||||||||||||||||||||||||
出版社 | International Center for Numerical Methods in Engineering | |||||||||||||||||||||||||||||
ISBN | ||||||||||||||||||||||||||||||
識別子タイプ | ISBN | |||||||||||||||||||||||||||||
関連識別子 | 978-84-943928-3-2 | |||||||||||||||||||||||||||||
著作権関連情報 | ||||||||||||||||||||||||||||||
権利情報 | Copyright (c) The Authors | |||||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||||||||
主題 | Structure-Fluid-Electric Interaction | |||||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||||||||
主題 | Decomposition | |||||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||||||||
主題 | Partitioning | |||||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||||||||
主題 | Splitting | |||||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||||||||
主題 | Finite Element Analysis | |||||||||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||||||||
主題 | Micro-Electro-Mechanical System (MEMS) | |||||||||||||||||||||||||||||
出版タイプ | ||||||||||||||||||||||||||||||
出版タイプ | VoR | |||||||||||||||||||||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||||||||||||||
査読の有無 | ||||||||||||||||||||||||||||||
値 | yes | |||||||||||||||||||||||||||||
研究者情報 | ||||||||||||||||||||||||||||||
https://hyokadb02.jimu.kyutech.ac.jp/html/255_ja.html | ||||||||||||||||||||||||||||||
論文ID(連携) | ||||||||||||||||||||||||||||||
10351412 | ||||||||||||||||||||||||||||||
連携ID | ||||||||||||||||||||||||||||||
8201 | ||||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||||
Department of Mechanical Information Science and Technology, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan | ||||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||||
Department of Mechanical Information Science and Technology, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan | ||||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||||
Department of Mechanical Information Science and Technology, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan | ||||||||||||||||||||||||||||||
著者所属 | ||||||||||||||||||||||||||||||
Center for Microelectronic System (CMS), Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan | ||||||||||||||||||||||||||||||
資料タイプ | ||||||||||||||||||||||||||||||
内容記述タイプ | Other | |||||||||||||||||||||||||||||
内容記述 | Conference Paper |