{"created":"2023-05-15T11:55:57.634536+00:00","id":1066,"links":{},"metadata":{"_buckets":{"deposit":"08a1955e-986b-4085-8eee-622f2760c4a2"},"_deposit":{"created_by":3,"id":"1066","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"1066"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:00001066","sets":["8:24"]},"author_link":["20416","4915","4916","4917"],"control_number":"1066","item_1689815586683":{"attribute_name":"CRID","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://cir.nii.ac.jp/crid/1573668927396194560","subitem_relation_type_select":"URI"}}]},"item_21_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1994-05-23","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"21","bibliographicPageEnd":"2878","bibliographicPageStart":"2876","bibliographicVolumeNumber":"64","bibliographic_titles":[{"bibliographic_title":"Applied Physics Letters","bibliographic_titleLang":"en"}]}]},"item_21_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Enhancement of the conductivity of zinc oxide through doping with hydrogen atoms was examined by using ion implantation of highly resistive thin films deposited by rf magnetron sputtering at room temperature. With a doping of 1 X 10(17) atoms cm-2, the conductivity after annealing at 200-degrees-C in an N2 atmosphere at 1 atm rose from the initial 1 X 10(-7) OMEGA-1 cm-1 to 5.5 X 10(2) OMEGA-1 cm-1.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_21_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"affiliations":[{"affiliationNames":[{"lang":"ja"}]}]}]},"item_21_publisher_7":{"attribute_name":"出版社","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics","subitem_publisher_language":"en"}]},"item_21_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1063/1.111401","subitem_relation_type_select":"DOI"}}]},"item_21_rights_13":{"attribute_name":"著作権関連情報","attribute_value_mlt":[{"subitem_rights":"Copyright © 1994 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics."}]},"item_21_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_21_source_id_10":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AA00543431","subitem_source_identifier_type":"NCID"}]},"item_21_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1077-3118","subitem_source_identifier_type":"EISSN"},{"subitem_source_identifier":"0003-6951","subitem_source_identifier_type":"PISSN"}]},"item_21_text_64":{"attribute_name":"業績ID","attribute_value_mlt":[{"subitem_text_value":"EBFA24656F48BA3549257561002017EC"}]},"item_21_version_type_58":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNames":[{}]}],"creatorNames":[{"creatorName":"Kohiki, Shigemi","creatorNameLang":"en"},{"creatorName":"古曵, 重美","creatorNameLang":"ja"},{"creatorName":"コヒキ, シゲミ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"Nishitani, M","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Wada, T","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Hirao, T","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2009-02-20"}],"displaytype":"detail","filename":"kohiki_11.pdf","filesize":[{"value":"2.4 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kohiki_11.pdf","url":"https://kyutech.repo.nii.ac.jp/record/1066/files/kohiki_11.pdf"},"version_id":"7e70277b-9011-4f3e-810f-cc511ae6e8f8"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"zinc oxides","subitem_subject_scheme":"Other"},{"subitem_subject":"thin films","subitem_subject_scheme":"Other"},{"subitem_subject":"electric conductivity","subitem_subject_scheme":"Other"},{"subitem_subject":"ion implantation","subitem_subject_scheme":"Other"},{"subitem_subject":"hydrogen","subitem_subject_scheme":"Other"},{"subitem_subject":"magnetron","subitem_subject_scheme":"Other"},{"subitem_subject":"sputtered materials","subitem_subject_scheme":"Other"},{"subitem_subject":"ambient temperature","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Enhanced Conductivity of Zinc-oxide thin-films by Ion-Implantation of Hydrogen-atoms","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Enhanced Conductivity of Zinc-oxide thin-films by Ion-Implantation of Hydrogen-atoms","subitem_title_language":"en"}]},"item_type_id":"21","owner":"3","path":["24"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2009-02-20"},"publish_date":"2009-02-20","publish_status":"0","recid":"1066","relation_version_is_last":true,"title":["Enhanced Conductivity of Zinc-oxide thin-films by Ion-Implantation of Hydrogen-atoms"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2024-01-18T04:38:29.538373+00:00"}