@article{oai:kyutech.repo.nii.ac.jp:00001096, author = {Nakano, M and Sato, S and Yamashita, F and Honda, Takashi and 本田, 崇 and Yamasaki, J and Ishiyama, K and Itakura, M and Fidler, J and Yanai, T and Fukunaga, H}, issue = {6}, journal = {IEEE Transactions on Magnetics}, month = {Jun}, note = {Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 mu m/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)(max) of approximately 120 kJ/m(3), which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the isotropic films were introduced.}, pages = {2672--2676}, title = {Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines}, volume = {43}, year = {2007}, yomi = {ホンダ, タカシ} }