@article{oai:kyutech.repo.nii.ac.jp:00000127, author = {Konishi, H and Matsuoka, H and Toyama, N and Naitoh, Masamichi and 内藤, 正路 and Nishigaki, Satoshi and Kusunoki, M}, journal = {Thin Solid Films}, month = {Oct}, note = {We have investigated laser irradiation effects on the growth of carbon nanotubes (CNTs) on6H-SiC(0001 -) surfaces. CNTs were formed densely and uniformly after annealing a6H-SiC(0001-) surface at 1700℃ in a vacuum, without laser-irradiation. However, amorphouscarbon layers were formed on the 6H-SiC(0001-) surface and the CNT growth was suppressedwhen the surface was irradiated by the ArF excimer laser with about 10mJ/cm2 for 5min in airbefore being annealed.}, pages = {295--298}, title = {Growth control of carbon nanotubes on silicon carbide surfaces using the laser irradiation effect}, volume = {464-465}, year = {2004}, yomi = {ナイトウ, マサミチ} }