{"created":"2024-06-05T02:46:45.789950+00:00","id":2000728,"links":{},"metadata":{"_buckets":{"deposit":"26ac0857-a2c3-4ae5-b4f8-563f8751f714"},"_deposit":{"created_by":14,"id":"2000728","owner":"14","owners":[14],"pid":{"revision_id":0,"type":"depid","value":"2000728"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:02000728","sets":["8:24"]},"author_link":["35477"],"control_number":"2000728","item_21_alternative_title_18":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"TEMPERATURE-COMPENSATED PURE SILICON CANTILEVER RESONATOR WITH COUPLED TORSIONAL STRUCTURE AT ANCHOR","subitem_alternative_title_language":"en"}]},"item_21_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2024-05-07","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"1820","bibliographicPageStart":"1817","bibliographic_titles":[{"bibliographic_title":"2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","bibliographic_titleLang":"en"}]}]},"item_21_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Combined with a coupled torsional structure at the anchor, a temperature compensated cantilever resonator was developed to reduce frequency dependence. The device shows the frequency dependence of 856 ppm with the temperature ranging from 25°C to 80°C. FEM simulation indicates that the coupled torsional structure at the anchor allows us to reduce temperature dependence of resonators to be 170 ppm with temperature ranging from −40°C to 80°C, optimizing wafer dopant, density, and mode.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_21_description_5":{"attribute_name":"備考","attribute_value_mlt":[{"subitem_description":"2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 25-29 June 2023, Kyoto, Japan","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_21_link_62":{"attribute_name":"研究者情報","attribute_value_mlt":[{"subitem_link_url":"https://hyokadb02.jimu.kyutech.ac.jp/html/100001774_ja.html"}]},"item_21_publisher_7":{"attribute_name":"出版社","attribute_value_mlt":[{"subitem_publisher":"IEEE"}]},"item_21_relation_38":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://ieeexplore.ieee.org/document/10516776","subitem_relation_type_select":"URI"}}]},"item_21_relation_9":{"attribute_name":"ISBN","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"979-8-3503-3302-2","subitem_relation_type_select":"ISBN"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"978-4-88686-435-2","subitem_relation_type_select":"ISBN"}}]},"item_21_rights_13":{"attribute_name":"著作権関連情報","attribute_value_mlt":[{"subitem_rights":"Copyright (c) 2024 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works."}]},"item_21_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_21_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"2167-0013","subitem_source_identifier_type":"PISSN"},{"subitem_source_identifier":"2167-0021","subitem_source_identifier_type":"EISSN"}]},"item_21_text_28":{"attribute_name":"論文ID（連携）","attribute_value_mlt":[{"subitem_text_value":"10435546"}]},"item_21_text_63":{"attribute_name":"連携ID","attribute_value_mlt":[{"subitem_text_value":"12352"}]},"item_21_version_type_58":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"山田, 駿介","creatorNameLang":"ja"},{"creatorName":"ヤマダ, シユンスケ","creatorNameLang":"ja-Kana"},{"creatorName":"Yamada, Shunsuke","creatorNameLang":"en"}],"familyNames":[{"familyName":"山田","familyNameLang":"ja"},{"familyName":"ヤマダ","familyNameLang":"ja-Kana"},{"familyName":"Yamada","familyNameLang":"en"}],"givenNames":[{"givenName":"駿介","givenNameLang":"ja"},{"givenName":"シユンスケ","givenNameLang":"ja-Kana"},{"givenName":"Shunsuke","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"35477","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"50811634","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://nrid.nii.ac.jp/ja/nrid/1000050811634"},{"nameIdentifier":"56683618300","nameIdentifierScheme":"Scopus著者ID","nameIdentifierURI":"https://www.scopus.com/authid/detail.uri?authorId=56683618300"},{"nameIdentifier":"0000-0002-9084-2070","nameIdentifierScheme":"ORCiD","nameIdentifierURI":"https://orcid.org/0000-0002-9084-2070"},{"nameIdentifier":"100001774","nameIdentifierScheme":"九工大研究者情報","nameIdentifierURI":"https://hyokadb02.jimu.kyutech.ac.jp/html/100001774_ja.html"}]},{"creatorNames":[{"creatorName":"Tanaka, Shuji","creatorNameLang":"en"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_access","date":[{"dateType":"Available","dateValue":"2024-06-05"}],"filename":"10435546.pdf","filesize":[{"value":"2.9 MB"}],"format":"application/pdf","mimetype":"application/pdf","url":{"url":"https://kyutech.repo.nii.ac.jp/record/2000728/files/10435546.pdf"},"version_id":"e30c600e-1793-44c3-b915-9132e1ad6633"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Resonator","subitem_subject_scheme":"Other"},{"subitem_subject":"temperature compensation","subitem_subject_scheme":"Other"},{"subitem_subject":"MEMS","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Temperature-Compensated Pure Silicon Cantilever Resonator with Coupled Torsional Structure at Anchor","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Temperature-Compensated Pure Silicon Cantilever Resonator with Coupled Torsional Structure at Anchor","subitem_title_language":"en"}]},"item_type_id":"21","owner":"14","path":["24"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2024-06-05"},"publish_date":"2024-06-05","publish_status":"0","recid":"2000728","relation_version_is_last":true,"title":["Temperature-Compensated Pure Silicon Cantilever Resonator with Coupled Torsional Structure at Anchor"],"weko_creator_id":"14","weko_shared_id":-1},"updated":"2024-09-30T06:36:56.277059+00:00"}