WEKO3
アイテム
Moving coil type electromagnetic microactuator using metal/silicon driving springs and parylene connecting beams for pure in-plane large motion in three axes
http://hdl.handle.net/10228/0002000757
http://hdl.handle.net/10228/000200075721ba69f2-415f-47af-b55b-42b5a17491eb
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
10430579.pdf (10.3 MB)
|
|
| アイテムタイプ | 学術雑誌論文 = Journal Article(1) | |||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2024-06-11 | |||||||||||||||||
| 資源タイプ | ||||||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||
| 資源タイプ | journal article | |||||||||||||||||
| タイトル | ||||||||||||||||||
| タイトル | Moving coil type electromagnetic microactuator using metal/silicon driving springs and parylene connecting beams for pure in-plane large motion in three axes | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| その他のタイトル | ||||||||||||||||||
| その他のタイトル | Moving Coil Type Electromagnetic Microactuator Using Metal/Silicon Driving Springs and Parylene Connecting Beams for Pure In-plane Large Motion in Three Axes | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 言語 | ||||||||||||||||||
| 言語 | eng | |||||||||||||||||
| 著者 |
Wang, Huayu
× Wang, Huayu
× 山田, 駿介
WEKO
35477
× Tanaka, Shuji
|
|||||||||||||||||
| 抄録 | ||||||||||||||||||
| 内容記述タイプ | Abstract | |||||||||||||||||
| 内容記述 | In this paper, we report a three-degree-of-freedom electromagnetic microactuator with pure in-plane bi-directional displacement in X and Y and rotation about Z. Moving coil scheme was adopted because pure in-plane actuation without vertical displacement was possible under a uniform magnetic field. The actuator mainly consists of four driving units and a center moving stage within a footprint of 6 mm × 6 mm. Each of the driving unit is formed by four driving springs made of silicon and gold and connected by a moving shuttle. Parylene was employed to make spring beams to connect the center moving stage and the shuttles of four driving units. In-plane Lorentz force was generated by the coupling between current in the driving springs and a uniform outer magnetic field. By controlling the strength of current and outer magnetic field, an in-plane bi-directional displacement as large as ± 40 µm in X and Y and rotation angle of ± 2 degrees about Z were measured, the corresponding resonant frequencies were 650 Hz and 780 Hz, respectively. | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 書誌情報 |
en : Sensors and Actuators A: Physical 巻 342, p. 113606, 発行日 2022-05-19 |
|||||||||||||||||
| 出版社 | ||||||||||||||||||
| 出版者 | Elsevier | |||||||||||||||||
| DOI | ||||||||||||||||||
| 関連タイプ | isVersionOf | |||||||||||||||||
| 識別子タイプ | DOI | |||||||||||||||||
| 関連識別子 | https://doi.org/10.1016/j.sna.2022.113606 | |||||||||||||||||
| ISSN | ||||||||||||||||||
| 収録物識別子タイプ | PISSN | |||||||||||||||||
| 収録物識別子 | 0924-4247 | |||||||||||||||||
| ISSN | ||||||||||||||||||
| 収録物識別子タイプ | EISSN | |||||||||||||||||
| 収録物識別子 | 1873-3069 | |||||||||||||||||
| 著作権関連情報 | ||||||||||||||||||
| 権利情報 | Copyright (c) 2022 Elsevier B.V. All rights reserved. | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | Electromagnetic microactuator | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | Multi-axis motion | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | Parylene spring | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | Large pure in-plane | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | displacement | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | Large rotation angle | |||||||||||||||||
| 出版タイプ | ||||||||||||||||||
| 出版タイプ | AM | |||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||||||||
| 査読の有無 | ||||||||||||||||||
| 値 | yes | |||||||||||||||||
| 研究者情報 | ||||||||||||||||||
| URL | https://hyokadb02.jimu.kyutech.ac.jp/html/100001774_ja.html | |||||||||||||||||
| 論文ID（連携） | ||||||||||||||||||
| 値 | 10430579 | |||||||||||||||||
| 連携ID | ||||||||||||||||||
| 値 | 12271 | |||||||||||||||||
