| アイテムタイプ |
学術雑誌論文 = Journal Article(1) |
| 公開日 |
2024-06-11 |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| タイトル |
|
|
タイトル |
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 著者 |
Wang, Huayu
Matsuura, Masashi
山田, 駿介
Sugimoto, Satoshi
Tanaka, Shuji
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
In this paper, we report an actuator with a magnet made of novel rare earth magnetic powder Sm-Fe-N with diameter of 2 µm to 5 µm. Micro magnets were fabricated by mixing the magnetic powder with wax at temperature of 90 °C. Alignment of the easy axis process was employed to enhance the remanence of the micro magnets. A 8 T strong pulse magnetic field was utilized to magnetize the micro magnets. The properties of magnetic powder were revealed with vibrating sample magnetometer by measuring micro magnets with various magnetic powder weight loading percentages. In the best condition, the remanence reaches 0.9 T and the energy product reaches 70 kJ m−3. After that, the electromagnetic actuator was fabricated by embedding the magnetic powder in deep-reactive-ion-etched Si cavity with wax binder and parylene capping. The completed microelectromechanical system structure was mounted on a four-layer printed circuit board with embedded coils. Upon the application of a direct current for actuation, a displacement of 180 μm was obtained from a device volume of only 1.5 mm3 with a low actuation power consumption of 11.5 mW. |
|
言語 |
en |
| 書誌情報 |
en : Journal of Micromechanics and Microengineering
巻 31,
号 7,
p. 75002,
発行日 2021-05-24
|
| 出版社 |
|
|
出版者 |
IOP Publishing |
| DOI |
|
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
https://doi.org/10.1088/1361-6439/abfeb3 |
| NCID |
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|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AA10804010 |
| ISSN |
|
|
収録物識別子タイプ |
PISSN |
|
収録物識別子 |
0960-1317 |
| ISSN |
|
|
収録物識別子タイプ |
EISSN |
|
収録物識別子 |
1361-6439 |
| 著作権関連情報 |
|
|
権利情報 |
Copyright (c) 2021 IOP Publishing Ltd Printed in the UK |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
rare earth Sm-Fe-N magnetic powder |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
remanence enhancement |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
electromagnetic actuator |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
large displacement |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
low power consumption |
| 出版タイプ |
|
|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| 査読の有無 |
|
|
値 |
yes |
| 研究者情報 |
|
|
URL |
https://hyokadb02.jimu.kyutech.ac.jp/html/100001774_ja.html |
| 論文ID（連携） |
|
|
値 |
10430580 |
| 連携ID |
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|
値 |
12282 |
10430580.pdf (5.1 MB)
