WEKO3
アイテム
Three Axis Actuation of Moving Coil Type Electromagnetic MEMS Actuator for Optical Image Stabilization
http://hdl.handle.net/10228/0002000759
http://hdl.handle.net/10228/000200075947e75498-1df4-46b2-84b6-571aebda0c4c
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
10430581.pdf (6.3 MB)
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| アイテムタイプ | 学術雑誌論文 = Journal Article(1) | |||||||||||||||||
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| 公開日 | 2024-06-11 | |||||||||||||||||
| 資源タイプ | ||||||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||
| 資源タイプ | journal article | |||||||||||||||||
| タイトル | ||||||||||||||||||
| タイトル | Three Axis Actuation of Moving Coil Type Electromagnetic MEMS Actuator for Optical Image Stabilization | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| その他のタイトル | ||||||||||||||||||
| その他のタイトル | THREE AXIS ACTUATION OF MOVING COIL TYPE ELECTROMAGNETIC MEMS ACTUATOR FOR OPTICAL IMAGE STABILIZATION | |||||||||||||||||
| 言語 | en | |||||||||||||||||
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| 言語 | eng | |||||||||||||||||
| 著者 |
Wang, Huayu
× Wang, Huayu
× 山田, 駿介
WEKO
35477
× Tanaka, Shuji
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| 抄録 | ||||||||||||||||||
| 内容記述タイプ | Abstract | |||||||||||||||||
| 内容記述 | In this paper, we report a moving coil type electromagnetic MEMS actuator with three-axis actuation which can be used in the application of optical image stabilizer (OIS). Compared with the conventional OIS actuators which are based on conventional machining and assembling technique, the actuator we developed is based on MEMS technique and can be used to actuate the CIS directly. The actuator has four driving units and one center moving stage. Connecting with driving units by parylene beams, the center moving stage is actuated by the application of current and outer magnetic field. The experimental results show that the in-plane displacement in X and Y and rotation in Z are nearly 50 µm and more than 2 degrees, respectively. Both the displacement and rotation angle can be improved by increase the current or magnetic field. The resonant frequencies of single direction displacement and rotation are 652 Hz and 780 Hz, respectively, which are sufficiently high for practical applications. | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 備考 | ||||||||||||||||||
| 内容記述タイプ | Other | |||||||||||||||||
| 内容記述 | 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 09-13 January, 2022, Tokyo, Japan | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 書誌情報 |
en : 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) p. 580-583, 発行日 2022-02-11 |
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| 出版社 | ||||||||||||||||||
| 出版者 | IEEE | |||||||||||||||||
| DOI | ||||||||||||||||||
| 識別子タイプ | DOI | |||||||||||||||||
| 関連識別子 | https://doi.org/10.1109/MEMS51670.2022.9699555 | |||||||||||||||||
| ISBN | ||||||||||||||||||
| 識別子タイプ | ISBN | |||||||||||||||||
| 関連識別子 | 978-1-6654-0912-4 | |||||||||||||||||
| ISBN | ||||||||||||||||||
| 識別子タイプ | ISBN | |||||||||||||||||
| 関連識別子 | 978-1-6654-0911-7 | |||||||||||||||||
| ISSN | ||||||||||||||||||
| 収録物識別子タイプ | PISSN | |||||||||||||||||
| 収録物識別子 | 1084-6999 | |||||||||||||||||
| ISSN | ||||||||||||||||||
| 収録物識別子タイプ | EISSN | |||||||||||||||||
| 収録物識別子 | 2160-1968 | |||||||||||||||||
| 著作権関連情報 | ||||||||||||||||||
| 権利情報 | Copyright (c) 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | multi-axis actuation | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | electromagnetic actuator | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | moving coil | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | parylene beam | |||||||||||||||||
| キーワード | ||||||||||||||||||
| 主題Scheme | Other | |||||||||||||||||
| 主題 | in-plane motion | |||||||||||||||||
| 出版タイプ | ||||||||||||||||||
| 出版タイプ | AM | |||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||||||||
| 査読の有無 | ||||||||||||||||||
| 値 | yes | |||||||||||||||||
| 研究者情報 | ||||||||||||||||||
| URL | https://hyokadb02.jimu.kyutech.ac.jp/html/100001774_ja.html | |||||||||||||||||
| 論文ID（連携） | ||||||||||||||||||
| 値 | 10430581 | |||||||||||||||||
| 連携ID | ||||||||||||||||||
| 値 | 12285 | |||||||||||||||||
