| アイテムタイプ |
学術雑誌論文 = Journal Article(1) |
| 公開日 |
2024-06-11 |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
| タイトル |
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|
タイトル |
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams |
|
言語 |
en |
| その他のタイトル |
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その他のタイトル |
A Sm-Fe-N magnetic powder based three-degree-of-freedom electromagnetic actuator with low resonant frequency by using parylene beams |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 著者 |
Wang, Huayu
山田, 駿介
Matsuura, Masashi
Sugimoto, Satoshi
Tanaka, Shuji
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| 抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
In this paper, we report a moving magnet type electromagnetic actuator with three-degree-of-freedom, namely the displacement in XY axes and rotation around Z axis, by utilizing rare earth magnetic powder Sm-Fe-N. Parylene was utilized to fabricate springs to suspend four drive units and a center moving stage located in the four corners and the center of the actuator, respectively. The rare earth magnetic powder Sm-Fe-N with wax were embedded in the silicon frames of the drive units with a parylene layer, followed by magnetization by an 8 T pulse magnetic field to obtain permanent micromagnets. The motion of the center moving stage can be controlled by the drive units. To obtain an in-plane displacement in the XY axes, compensation coils were fabricated in a print circuit board (PCB) to eliminate the Lorentz force in the Z axis. The application of a direct current (DC) allowed the center moving stage to move in the XY axes by 55 μm and rotate almost 3 degrees around the Z axis, respectively. The resonance frequencies of the motion in the XY axes and the rotation around the Z axis were 630 Hz and 675 Hz, respectively. |
|
言語 |
en |
| 書誌情報 |
en : Journal of Microelectromechanical Systems
巻 31,
号 4,
p. 634-643,
発行日 2022-06-24
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| 出版社 |
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出版者 |
IEEE |
| DOI |
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関連タイプ |
isVersionOf |
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識別子タイプ |
DOI |
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関連識別子 |
https://doi.org/10.1109/JMEMS.2022.3183611 |
| ISSN |
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収録物識別子タイプ |
PISSN |
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収録物識別子 |
1057-7157 |
| ISSN |
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収録物識別子タイプ |
EISSN |
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収録物識別子 |
1941-0158 |
| 著作権関連情報 |
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権利情報 |
Copyright (c) 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
| 出版タイプ |
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出版タイプ |
AM |
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出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| 査読の有無 |
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値 |
yes |
| 研究者情報 |
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|
URL |
https://hyokadb02.jimu.kyutech.ac.jp/html/100001774_ja.html |
| 論文ID（連携） |
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|
値 |
10430582 |
| 連携ID |
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値 |
12281 |
10430582.pdf (5.9 MB)
