| アイテムタイプ |
共通アイテムタイプ(1) |
| 公開日 |
2025-01-29 |
| タイトル |
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|
タイトル |
Design and Simulation of Piezoelectric Wideband Acoustic Sensor Covered with Organic Film |
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言語 |
en |
| その他のタイトル |
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その他のタイトル |
Design and simulation of piezoelectric wideband acoustic sensor covered with organic film |
|
言語 |
en |
| 著者 |
Kuchiji, Hiroyuki
Masumoto, Naoki
Morishita, Kota
Hasegawa, Shunta
Suzuki, Takaaki
馬場, 昭好
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| 著作権関連情報 |
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権利情報 |
Copyright (c) 2024 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
| 抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
A wideband acoustic sensor is reported in which the cantilevers are covered with an organic film in a piezoelectric micro-electro mechanical systems (MEMS) acoustic transducer. Coating the gap between the cantilevers with an organic film expands the low-frequency sensitivity, and connecting the cantilevers with an organic film increases the resonance frequency. Therefore, a broadband acoustic sensor can be realized [1]. However, coating with an organic film lowers the sensitivity, making the selection of the material for the organic film crucial. In this study, we perform finite element method (FEM) simulations using a combination of piezoelectric materials and organic films and provide guidelines for selecting organic films. Simulations are performed using AlN, ZnO, and polyvinylidene fluoride (PVDF) as piezoelectric materials. The results show that the larger the Young’s modulus ratio between the piezoelectric layer and the organic film, the lesser the effect of the organic film, which is expected to suppress the decrease in sensitivity caused by the organic film. The simulation results of the effective stress distribution from the fixed end to the free end of the cantilever confirms that there exists a region where the effective stress is high near the tip of the cantilever. This suggests that sensitivity can be improved by placing the electrode near the tip of the cantilever. |
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言語 |
en |
| 備考 |
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内容記述タイプ |
Other |
|
内容記述 |
2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON), 16-18 February, 2024, Pattaya, Thailand |
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言語 |
en |
| 書誌情報 |
en : 2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON)
p. 59-63,
発行日 2024-03-19
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| 出版社 |
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出版者 |
IEEE |
| キーワード |
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主題Scheme |
Other |
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主題 |
Acoustic sensor |
| キーワード |
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主題Scheme |
Other |
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主題 |
FEM simulation |
| キーワード |
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主題Scheme |
Other |
|
主題 |
MEMS |
| キーワード |
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主題Scheme |
Other |
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主題 |
microphone |
| キーワード |
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主題Scheme |
Other |
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主題 |
organic film |
| キーワード |
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主題Scheme |
Other |
|
主題 |
piezoelectric |
| キーワード |
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主題Scheme |
Other |
|
主題 |
resonance frequency |
| 言語 |
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|
言語 |
eng |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
| 出版タイプ |
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出版タイプ |
AM |
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出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| DOI |
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|
識別子タイプ |
DOI |
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|
関連識別子 |
https://doi.org/10.1109/RESTCON60981.2024.10463576 |
| ISBN |
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識別子タイプ |
ISBN |
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関連識別子 |
979-8-3503-4884-2 |
| 会議記述 |
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会議名 |
International Conference on Robotics, Engineering, Science, and Technology (RESTCON) |
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言語 |
en |
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回次 |
1 |
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開始年 |
2024 |
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開始月 |
02 |
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開始日 |
16 |
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終了年 |
2024 |
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終了月 |
02 |
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終了日 |
18 |
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開催国 |
THA |
| 査読の有無 |
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値 |
yes |
| 研究者情報 |
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URL |
https://hyokadb02.jimu.kyutech.ac.jp/html/382_ja.html |
| 論文ID（連携） |
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|
値 |
10443574 |
| 連携ID |
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|
値 |
12535 |
10443574.pdf (1.2 MB)
