| アイテムタイプ |
共通アイテムタイプ(1) |
| 公開日 |
2025-01-29 |
| タイトル |
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|
タイトル |
Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film |
|
言語 |
en |
| 著者 |
Kuchiji, Hiroyuki
Masumoto, Naoki
Morishita, Kota
Hasegawa, Shunta
Suzuki, Takaaki
馬場, 昭好
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| 著作権関連情報 |
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|
権利情報 |
Copyright (c) 2024 The Japan Society of Applied Physics |
| 抄録 |
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内容記述タイプ |
Abstract |
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内容記述 |
A wideband acoustic sensor is reported, comprising a piezoelectric MEMS acoustic transducer with organic film-coated cantilevers. Considering the sensitivity reduction associated with the application of an organic film, it is necessary to optimize the material selection and thickness of the organic film. Therefore, the relationship between the thickness of the polyurethane film and the consequent loss in sensitivity is elucidated. Our findings demonstrate that the polyurethane film thickness should be approximately 0.5 μm (or less) to limit sensitivity loss to 6 dB. Additionally, both simulations and experimental results reveal that the resonant frequency of the system is significantly influenced by the warpage of the cantilever. This study provides essential insights into optimizing the performance of MEMS acoustic transducers with organic film-coated cantilevers. |
|
言語 |
en |
| 書誌情報 |
en : Japanese Journal of Applied Physics
巻 63,
号 3,
p. 03SP73,
発行日 2024-03-05
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| 出版社 |
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出版者 |
応用物理学会 |
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言語 |
ja |
| 言語 |
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|
言語 |
eng |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
| 出版タイプ |
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出版タイプ |
AM |
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出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| DOI |
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識別子タイプ |
DOI |
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関連識別子 |
https://doi.org/10.35848/1347-4065/ad2918 |
| NCID |
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収録物識別子タイプ |
NCID |
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収録物識別子 |
AA12295836 |
| ISSN |
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収録物識別子タイプ |
PISSN |
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収録物識別子 |
0021-4922 |
| ISSN |
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収録物識別子タイプ |
EISSN |
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収録物識別子 |
1347-4065 |
| 査読の有無 |
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|
値 |
yes |
| 研究者情報 |
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URL |
https://hyokadb02.jimu.kyutech.ac.jp/html/382_ja.html |
| 論文ID（連携） |
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|
値 |
10443572 |
| 連携ID |
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|
値 |
12539 |
10443572.pdf (583 KB)
