@article{oai:kyutech.repo.nii.ac.jp:00002489, author = {土方, 邦夫 and Miyazaki, Koji and 宮崎, 康次 and 井上, 剛良 and 中別府, 修}, issue = {605}, journal = {日本機械学會論文集. B編}, month = {Jan}, note = {The stability of a very thin film at the initial stage of deposition was investigated using perturbation theory. It is assumed that the critical wavelength of perturbation on a continuous thin film corresponds to the diameter of nuclei and that the surface tension of a thin film changes with the film thickness. With these assumptions, it can be shown that the diameter of a nucleus increases linearly with the deposition time. It is interesting to note that the resulting equation is similar to the well-known equation of contact angle. To confirm the result of the analysis, a vacuum deposition experiment was conducted. Copper nuclei on the substrate were observed using a transmission electron microscope and diameters of island unclei were measured. The results clearly show that the effective diameter of nuclei increases linearly with deposition time. The good agreement between analysis and the experiment indicates the validity of this analysis.}, pages = {261--266}, title = {薄膜生成過程における3次元核成長に関する研究}, volume = {63}, year = {1997}, yomi = {ミヤザキ, コウジ} }