{"created":"2023-05-15T11:57:01.975665+00:00","id":2489,"links":{},"metadata":{"_buckets":{"deposit":"7d960405-1a0d-469d-9c42-baaf82c8d105"},"_deposit":{"created_by":3,"id":"2489","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"2489"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:00002489","sets":["8:9"]},"author_link":["8872","679","8870","8873"],"control_number":"2489","item_21_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1997-01-25","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"605","bibliographicPageEnd":"266","bibliographicPageStart":"261","bibliographicVolumeNumber":"63","bibliographic_titles":[{"bibliographic_title":"日本機械学會論文集. B編"}]}]},"item_21_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The stability of a very thin film at the initial stage of deposition was investigated using perturbation theory. It is assumed that the critical wavelength of perturbation on a continuous thin film corresponds to the diameter of nuclei and that the surface tension of a thin film changes with the film thickness. With these assumptions, it can be shown that the diameter of a nucleus increases linearly with the deposition time. It is interesting to note that the resulting equation is similar to the well-known equation of contact angle. To confirm the result of the analysis, a vacuum deposition experiment was conducted. Copper nuclei on the substrate were observed using a transmission electron microscope and diameters of island unclei were measured. The results clearly show that the effective diameter of nuclei increases linearly with deposition time. The good agreement between analysis and the experiment indicates the validity of this analysis.","subitem_description_type":"Abstract"}]},"item_21_description_60":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Journal Article","subitem_description_type":"Other"}]},"item_21_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"社団法人日本機械学会"}]},"item_21_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1299/kikaib.63.605_261","subitem_relation_type_select":"DOI"}}]},"item_21_relation_66":{"attribute_name":"論文ID（NAID）","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"110006474957","subitem_relation_type_select":"NAID"}}]},"item_21_rights_13":{"attribute_name":"著作権関連情報","attribute_value_mlt":[{"subitem_rights":"社団法人日本機械学会. 本文データは学協会の許諾に基づきCiNiiから複製したものである"}]},"item_21_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_21_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0387-5016","subitem_source_identifier_type":"PISSN"}]},"item_21_text_36":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東京工業大学工学部"}]},"item_21_text_64":{"attribute_name":"業績ID","attribute_value_mlt":[{"subitem_text_value":"65AEEF7380239214492576700021D624"}]},"item_21_version_type_58":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"土方, 邦夫","creatorNameLang":"ja"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":""}]}],"creatorNames":[{"creatorName":"Miyazaki, Koji","creatorNameLang":"en"},{"creatorName":"宮崎, 康次","creatorNameLang":"ja"},{"creatorName":"ミヤザキ, コウジ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{},{}]},{"creatorNames":[{"creatorName":"井上, 剛良","creatorNameLang":"ja"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"中別府, 修","creatorNameLang":"ja"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2010-01-15"}],"displaytype":"detail","filename":"110006474957.pdf","filesize":[{"value":"524.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"110006474957.pdf","url":"https://kyutech.repo.nii.ac.jp/record/2489/files/110006474957.pdf"},"version_id":"1cb3bf32-19a2-4816-923b-b722bad50f39"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Condensation","subitem_subject_scheme":"Other"},{"subitem_subject":"Nucleation","subitem_subject_scheme":"Other"},{"subitem_subject":"Surface Tension","subitem_subject_scheme":"Other"},{"subitem_subject":"Deposition","subitem_subject_scheme":"Other"},{"subitem_subject":"Thin Film","subitem_subject_scheme":"Other"},{"subitem_subject":"Island Structure","subitem_subject_scheme":"Other"},{"subitem_subject":"Perturbation Theory","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"薄膜生成過程における3次元核成長に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"薄膜生成過程における3次元核成長に関する研究","subitem_title_language":"ja"}]},"item_type_id":"21","owner":"3","path":["9"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2010-01-15"},"publish_date":"2010-01-15","publish_status":"0","recid":"2489","relation_version_is_last":true,"title":["薄膜生成過程における3次元核成長に関する研究"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2024-04-02T08:44:25.128880+00:00"}