@article{oai:kyutech.repo.nii.ac.jp:00003052,
 author = {近浦, 吉則 and 山田, 啓義},
 issue = {40},
 journal = {九州工業大学研究報告. 工学, Bulletin of the Kyushu Institute of Technology. Science and technology},
 month = {Mar},
 pages = {167--175},
 title = {銅を拡散添加したシリコンウェーハーのX線回折固有反射半値幅の測定},
 year = {1980}
}