@article{oai:kyutech.repo.nii.ac.jp:00003379, author = {若山, 登}, issue = {77}, journal = {九州工業大学研究報告. 工学, Bulletin of the Kyushu Institute of Technology. Science and technology}, month = {Mar}, pages = {37--43}, title = {微細加工技術とナノ・ミクロ解剖装置による研究例}, year = {2005} }