{"created":"2023-05-15T11:58:47.688279+00:00","id":4961,"links":{},"metadata":{"_buckets":{"deposit":"6e8e28a6-1e8a-4fd0-a07e-87df40252d6b"},"_deposit":{"created_by":3,"id":"4961","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"4961"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:00004961","sets":["8:24"]},"author_link":["25636","203","19959","19961","19962","19958"],"item_21_alternative_title_18":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Temperature Control of RCA Cleaning Solutions via Model Switching Predictive Control Using First-difference Signals and Bagging CAN2"}]},"item_21_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-06-30","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6","bibliographicPageEnd":"312","bibliographicPageStart":"305","bibliographicVolumeNumber":"45","bibliographic_titles":[{"bibliographic_title":"計測自動制御学会論文集"}]}]},"item_21_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The RCA cleaning method is the industry standard way for cleaning silicon wafers, and the temperature control is important for a stable cleaning performance. However, the difficulty lies in the fact that the RCA solutions cause nonlinear and time-varying exothermic chemical reactions. So far, the MSPC (model switching predictive controller) using the CAN2 (competitive associative net 2) has been developed and the effectiveness has been validated. However, we have observed that the control performance, such as the settling time and the overshoot, does not always improve with the increase of the number of learning iterations for the CAN2. To solve this problem, we introduce the bagging method for the CAN2 and first-difference signals for effectively embedding the bagging method. The effectiveness and the performance of the present method are examined by means of numerical experiments.","subitem_description_type":"Abstract"}]},"item_21_description_60":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Journal Article","subitem_description_type":"Other"}]},"item_21_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"affiliations":[{"affiliationNames":[{"affiliationName":"","lang":"ja"}],"nameIdentifiers":[]}],"familyNames":[{"familyName":"Fujimoto","familyNameLang":"en"},{"familyName":"藤本","familyNameLang":"ja"},{"familyName":"フジモト","familyNameLang":"ja-Kana"}],"givenNames":[{"givenName":"Akiko","givenNameLang":"en"},{"givenName":"晶子","givenNameLang":"ja"},{"givenName":"アキコ","givenNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"25636","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"40578803","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://nrid.nii.ac.jp/ja/nrid/1000040578803"},{"nameIdentifier":"7102932224","nameIdentifierScheme":"Scopus著者ID","nameIdentifierURI":"https://www.scopus.com/authid/detail.uri?authorId=7102932224"},{"nameIdentifier":"0000-0001-9686-6228","nameIdentifierScheme":"ORCiD","nameIdentifierURI":"https://orcid.org/0000-0001-9686-6228"},{"nameIdentifier":"100001151","nameIdentifierScheme":"九工大研究者情報","nameIdentifierURI":"https://hyokadb02.jimu.kyutech.ac.jp/html/100001151_ja.html"}],"names":[{"name":"Fujimoto, Akiko","nameLang":"en"},{"name":"藤本, 晶子","nameLang":"ja"},{"name":"フジモト, アキコ","nameLang":"ja-Kana"}]},{"nameIdentifiers":[{"nameIdentifier":"19961","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Koshiyama,  Yohei"}]},{"nameIdentifiers":[{"nameIdentifier":"19962","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Yuno,  Hiroshi"}]}]},"item_21_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"公益社団法人計測自動制御学会"}]},"item_21_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"info:doi/10.9746/sicetr.45.305","subitem_relation_type_select":"DOI"}}]},"item_21_relation_14":{"attribute_name":"情報源","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://doi.org/10.9746/sicetr.45.305"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.9746/sicetr.45.305","subitem_relation_type_select":"DOI"}}]},"item_21_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (c) 2009 SICE"}]},"item_21_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_21_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00072392","subitem_source_identifier_type":"NCID"}]},"item_21_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0453-4654","subitem_source_identifier_type":"ISSN"}]},"item_21_text_36":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"九州工業大学大学院工学研究院"},{"subitem_text_value":"九州工業大学大学院工学府"},{"subitem_text_value":"九州工業大学大学院工学府"}]},"item_21_text_63":{"attribute_name":"連携ID","attribute_value_mlt":[{"subitem_text_value":"898"}]},"item_21_version_type_58":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":""}]}],"creatorNames":[{"creatorName":"Kurogi, Shuichi","creatorNameLang":"en"},{"creatorName":"黒木, 秀一","creatorNameLang":"ja"},{"creatorName":"クロギ, シュウイチ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"越山,  陽平"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"湯野,  洋司"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-05-08"}],"displaytype":"detail","filename":"TSICE45_305.pdf","filesize":[{"value":"923.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TSICE45_305.pdf","url":"https://kyutech.repo.nii.ac.jp/record/4961/files/TSICE45_305.pdf"},"version_id":"20164d0a-fbde-4aee-9299-051a77ddc2fa"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"temperature control of RCA cleaning solutions","subitem_subject_scheme":"Other"},{"subitem_subject":"first-difference signals","subitem_subject_scheme":"Other"},{"subitem_subject":"bagging competitive associative net","subitem_subject_scheme":"Other"},{"subitem_subject":"piecewise linear approximation of nonlinear and time-varying system","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"一次差分信号とバギングCAN2を用いるモデル切り替え型予測制御によるRCA洗浄液の温度制御","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"一次差分信号とバギングCAN2を用いるモデル切り替え型予測制御によるRCA洗浄液の温度制御"}]},"item_type_id":"21","owner":"3","path":["24"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-05-08"},"publish_date":"2017-05-08","publish_status":"0","recid":"4961","relation_version_is_last":true,"title":["一次差分信号とバギングCAN2を用いるモデル切り替え型予測制御によるRCA洗浄液の温度制御"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-10-25T08:45:22.078430+00:00"}