@article{oai:kyutech.repo.nii.ac.jp:00005036,
 author = {Luo,  Suning and Kohiki, Shigemi and 古曵, 重美 and Okada,  Koichi and Shoji,  Fumiya and Shishido,  Toetsu},
 issue = {2},
 journal = {Physica Status Solidi. A, Applications and Materials Science},
 month = {Feb},
 note = {Indium tin oxide (ITO) thin films were sputter deposited by using working gas containing hydrogen on glass substrate without any heat treatments. The films demonstrated X-ray diffraction due to polycrystalline ITO, blue-green photoluminescence (PL) due to oxygen defects in nano-structured ITO crystals, and paramagnetic behaviour in temperature dependence of magnetization overlapped with diamagnetic signal from the substrate. The carrier density n of the films was of the order of 1020 cm−3, and varied as an inverse of V-character with the hydrogen concentration [H] in the gas. The n value peaked at [H] = 1%. Spectral features at ≈430 and ≈470 nm of the PL emission were invariant with [H]. The order of the density of electrons N with spins obeying the Curie law was 1023 cm−3, and the variation in N with [H] was almost parallel to that in n with [H].},
 pages = {386--390},
 title = {Hydrogen effects on crystallinity, photoluminescence, and magnetization of indium tin oxide thin films sputter-deposited on glass substrate without heat treatment},
 volume = {207},
 year = {2010},
 yomi = {コヒキ, シゲミ}
}