@article{oai:kyutech.repo.nii.ac.jp:00005050, author = {Watanabe, Akihiko and 渡邉, 晃彦 and Tsukuda, M. and Omura, Ichiro and 大村, 一郎}, issue = {9-10}, journal = {Microelectronics Reliability}, month = {Jul}, note = {The aim is to provide failure analysis of power devices based on real-time monitoring. The real-time monitoring provides a time-domain data related to a failure mechanism. The data includes important information about primary failure, which is often lost by conventional post-defect failure analysis. Our system monitors interfaces of component material inside the device by scanning acoustic tomography (SAT) under a power cycling test in addition to electrical and thermal condition of the device. A precursor of the failure in an early stage was indicated by the interface image much earlier than a thermal and an electrical technique. Feature identification and extraction from a series of image data by image processing efficiently pointed out the damaged site before the failure was occurred., ESREF 2015, 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Oct 5-9, 2015, Centre de Congrès Pierre Baudis, Toulouse, France}, pages = {2032--2035}, title = {Failure Analysis of Power Devices Based on Real-Time Monitoring}, volume = {55}, year = {2015}, yomi = {ワタナベ, アキヒコ and オオムラ, イチロウ} }