@article{oai:kyutech.repo.nii.ac.jp:00005249,
 author = {Tsubota, Toshiki and 坪田, 敏樹 and Amano,  Hiroshi and Kojo,  Taiki and Murakami, Naoya and 村上, 直也 and Ohno, Teruhisa and 横野, 照尚},
 issue = {1410},
 journal = {Journal of the Ceramic Society of Japan},
 month = {Feb},
 note = {Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface.},
 pages = {187--194},
 title = {Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD},
 volume = {121},
 year = {2013},
 yomi = {ツボタ, トシキ and ムラカミ, ナオヤ and オウノ, テルヒサ}
}