{"created":"2023-05-15T11:59:01.695540+00:00","id":5284,"links":{},"metadata":{"_buckets":{"deposit":"fd39855e-06f4-4bc9-a65d-009bbbac1383"},"_deposit":{"created_by":3,"id":"5284","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"5284"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:00005284","sets":["15:20"]},"author_link":["21277","21276","16176","21274","21279"],"item_23_alternative_title_18":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Investigation of Epitaxial Wafer Evaluation Accuracy with Microwave Photoconductivity Decay"}]},"item_23_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-11-20","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"11","bibliographicPageStart":"7","bibliographicVolumeNumber":"2017","bibliographic_titles":[{"bibliographic_title":"電気学会研究会資料. EDD, 電子デバイス研究会"}]}]},"item_23_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We discussed applying the microwave photoconductivity decay (µ-PCD) to measure carrier lifetime of silicon epitaxial wafer. This paper clarified the range of evaluable substrate concentration and thickness by construction of conditional expression and TCAD simulation. The result becomes guideline on evaluation accuracy of epitaxial wafer for power device.","subitem_description_type":"Abstract"}]},"item_23_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"電気学会電子デバイス/半導体電力変換合同研究会（IEE-SPC）パワーデバイス・パワーエレクトロニクスとその実装技術, 2017年11月20日-21日, 鹿児島大学 稲盛会館, 鹿児島県","subitem_description_type":"Other"}]},"item_23_description_60":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Conference Paper","subitem_description_type":"Other"}]},"item_23_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"21277","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Manabe,  Wataru"}]},{"affiliations":[{"affiliationNames":[{"affiliationName":"","lang":"ja"}],"nameIdentifiers":[]}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{"nameIdentifier":"16176","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"10510670","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://nrid.nii.ac.jp/ja/nrid/1000010510670"},{"nameIdentifier":"7003814580","nameIdentifierScheme":"Scopus著者ID","nameIdentifierURI":"https://www.scopus.com/authid/detail.uri?authorId=7003814580"},{"nameIdentifier":"69","nameIdentifierScheme":"九工大研究者情報","nameIdentifierURI":"https://hyokadb02.jimu.kyutech.ac.jp/html/69_ja.html"}],"names":[{"name":"Omura, Ichiro","nameLang":"en"},{"name":"大村, 一郎","nameLang":"ja"},{"name":"オオムラ, イチロウ","nameLang":"ja-Kana"}]},{"nameIdentifiers":[{"nameIdentifier":"21279","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Tsukuda,  Masanori"}]}]},"item_23_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"一般社団法人電気学会"}]},"item_23_relation_66":{"attribute_name":"論文ID（NAID）","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"40021407424","subitem_relation_type_select":"NAID"}}]},"item_23_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"一般社団法人電気学会"}]},"item_23_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_23_text_37":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"九州工業大学"},{"subitem_text_value":"九州工業大学"},{"subitem_text_value":"北九州市環境エレクトロニクス研究所"}]},"item_23_text_62":{"attribute_name":"連携ID","attribute_value_mlt":[{"subitem_text_value":"6600"}]},"item_23_version_type_58":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"真辺,  航"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Omura, Ichiro","creatorNameLang":"en"},{"creatorName":"大村, 一郎","creatorNameLang":"ja"},{"creatorName":"オオムラ, イチロウ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"附田,  正則"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-10"}],"displaytype":"detail","filename":"nperc97.pdf","filesize":[{"value":"657.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"nperc97.pdf","url":"https://kyutech.repo.nii.ac.jp/record/5284/files/nperc97.pdf"},"version_id":"244b7707-1b72-4529-83ae-2f89f3324bbc"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"パワーデバイス","subitem_subject_scheme":"Other"},{"subitem_subject":"エピタキシャルウェーハ","subitem_subject_scheme":"Other"},{"subitem_subject":"キャリアライフタイム","subitem_subject_scheme":"Other"},{"subitem_subject":"マイクロ波光導電減衰法","subitem_subject_scheme":"Other"},{"subitem_subject":"TCADシミュレーション","subitem_subject_scheme":"Other"},{"subitem_subject":"評価精度","subitem_subject_scheme":"Other"},{"subitem_subject":"Power Device","subitem_subject_scheme":"Other"},{"subitem_subject":"Epitaxial Wafer","subitem_subject_scheme":"Other"},{"subitem_subject":"Carrier lifetime","subitem_subject_scheme":"Other"},{"subitem_subject":"Microwave Photoconductivity Decay","subitem_subject_scheme":"Other"},{"subitem_subject":"TCAD Simulation","subitem_subject_scheme":"Other"},{"subitem_subject":"Evaluation Accuracy","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"µ-PCD法によるエピタキシャルウェーハ評価の精度に関する検討","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"µ-PCD法によるエピタキシャルウェーハ評価の精度に関する検討"}]},"item_type_id":"23","owner":"3","path":["20"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-01-10"},"publish_date":"2018-01-10","publish_status":"0","recid":"5284","relation_version_is_last":true,"title":["µ-PCD法によるエピタキシャルウェーハ評価の精度に関する検討"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-10-25T10:49:08.382559+00:00"}