@inproceedings{oai:kyutech.repo.nii.ac.jp:00006485,
 author = {Ishihara, Daisuke and 石原, 大輔 and Horie, Tomoyoshi and 堀江, 知義 and Niho, Tomoya and 二保, 知也 and Baba, Akiyoshi and 馬場, 昭好},
 book = {Proceedings of the VI International Conference on Coupled Problems in Science and Engineering},
 month = {Apr},
 note = {In this study, a hierarchal decomposition for the interaction of the structure, fluid and electrostatic field or the structure-fluid-electrostatic interaction, which is one of typical phenomena in micro-electro-mechanical system (MEMS), is proposed in order to solve it efficiently. The proposed decomposition partitions the structure-fluid-electrostatic interaction into the fluid-structure interaction (FSI) and the electrostatic field, and, moreover, splits the FSI into the velocity and fluid pressure fields. In this way, the whole interaction system is decomposed into the three fields in a hierarchal way. The proposed decomposition is implemented using a finite element method and is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparison among the results for the structure-fluid-electrostatic interaction, the FSI and the experiment that the proposed method taking into account the full-interaction can predict the vibration characteristic of the MEMS accurately., Ⅵ International Conference on Computational Methods for Coupled Problems in Science and Engineering (COUPLED PROBLEMS 2015), 18 - 20 May, 2015, Venice, Italy},
 pages = {1023--1028},
 publisher = {International Center for Numerical Methods in Engineering},
 title = {Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems},
 year = {2015},
 yomi = {イシハラ, ダイスケ and ホリエ, トモヨシ and ニホ, トモヤ and ババ, アキヨシ}
}