{"created":"2023-05-15T11:59:52.466109+00:00","id":6485,"links":{},"metadata":{"_buckets":{"deposit":"fcfd6927-39f5-4c4f-946b-ba3f2c982abf"},"_deposit":{"created_by":3,"id":"6485","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"6485"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:00006485","sets":["15:20"]},"author_link":["799","16208","1344","6646"],"item_23_alternative_title_18":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"FINITE ELEMENT ANALYSIS USING A HIERARCHAL DECOMPOSITION FOR THE INTERACTION OF STRUCTURE, FLUID AND ELECTROSTATIC FIELD IN MEMS"}]},"item_23_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2015-04-01","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"1028","bibliographicPageStart":"1023","bibliographic_titles":[{"bibliographic_title":"Proceedings of the VI International Conference on Coupled Problems in Science and Engineering"}]}]},"item_23_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"In this study, a hierarchal decomposition for the interaction of the structure, fluid and electrostatic field or the structure-fluid-electrostatic interaction, which is one of typical phenomena in micro-electro-mechanical system (MEMS), is proposed in order to solve it efficiently. The proposed decomposition partitions the structure-fluid-electrostatic interaction into the fluid-structure interaction (FSI) and the electrostatic field, and, moreover, splits the FSI into the velocity and fluid pressure fields. In this way, the whole interaction system is decomposed into the three fields in a hierarchal way. The proposed decomposition is implemented using a finite element method and is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparison among the results for the structure-fluid-electrostatic interaction, the FSI and the experiment that the proposed method taking into account the full-interaction can predict the vibration characteristic of the MEMS accurately.","subitem_description_type":"Abstract"}]},"item_23_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Ⅵ International Conference on Computational Methods for Coupled Problems in Science and Engineering (COUPLED PROBLEMS 2015), 18 - 20 May, 2015, Venice, Italy","subitem_description_type":"Other"}]},"item_23_description_60":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Conference Paper","subitem_description_type":"Other"}]},"item_23_link_61":{"attribute_name":"研究者情報","attribute_value_mlt":[{"subitem_link_url":"https://hyokadb02.jimu.kyutech.ac.jp/html/255_ja.html"}]},"item_23_publisher_7":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"International Center for Numerical Methods in Engineering"}]},"item_23_relation_9":{"attribute_name":"ISBN","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"978-84-943928-3-2","subitem_relation_type_select":"ISBN"}}]},"item_23_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (c) The Authors"}]},"item_23_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_23_text_28":{"attribute_name":"論文ID（連携）","attribute_value_mlt":[{"subitem_text_value":"10351412"}]},"item_23_text_37":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"Department of Mechanical Information Science and Technology, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan"},{"subitem_text_value":"Center for Microelectronic System (CMS), Kyushu Institute of Technology, 680-4 Kawazu, Iizuka, Fukuoka 820-8502, Japan"}]},"item_23_text_62":{"attribute_name":"連携ID","attribute_value_mlt":[{"subitem_text_value":"8201"}]},"item_23_version_type_58":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Ishihara, Daisuke","creatorNameLang":"en"},{"creatorName":"石原, 大輔","creatorNameLang":"ja"},{"creatorName":"イシハラ, ダイスケ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{},{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Horie, Tomoyoshi","creatorNameLang":"en"},{"creatorName":"堀江, 知義","creatorNameLang":"ja"},{"creatorName":"ホリエ, トモヨシ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Niho, Tomoya","creatorNameLang":"en"},{"creatorName":"二保, 知也","creatorNameLang":"ja"},{"creatorName":"ニホ, トモヤ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Baba, Akiyoshi","creatorNameLang":"en"},{"creatorName":"馬場, 昭好","creatorNameLang":"ja"},{"creatorName":"ババ, アキヨシ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-04-06"}],"displaytype":"detail","filename":"coupled_problems_2015_p.1023.pdf","filesize":[{"value":"772.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"coupled_problems_2015_p.1023.pdf","url":"https://kyutech.repo.nii.ac.jp/record/6485/files/coupled_problems_2015_p.1023.pdf"},"version_id":"9a2fd966-b4f4-4ddc-aac9-40bf675b5788"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Structure-Fluid-Electric Interaction","subitem_subject_scheme":"Other"},{"subitem_subject":"Decomposition","subitem_subject_scheme":"Other"},{"subitem_subject":"Partitioning","subitem_subject_scheme":"Other"},{"subitem_subject":"Splitting","subitem_subject_scheme":"Other"},{"subitem_subject":"Finite Element Analysis","subitem_subject_scheme":"Other"},{"subitem_subject":"Micro-Electro-Mechanical System (MEMS)","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems"}]},"item_type_id":"23","owner":"3","path":["20"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-04-06"},"publish_date":"2020-04-06","publish_status":"0","recid":"6485","relation_version_is_last":true,"title":["Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-10-25T10:48:10.214702+00:00"}