{"created":"2023-05-15T11:59:52.765815+00:00","id":6494,"links":{},"metadata":{"_buckets":{"deposit":"382bc8dc-74a8-40bc-bfc9-c828ff213d98"},"_deposit":{"created_by":3,"id":"6494","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"6494"},"status":"published"},"_oai":{"id":"oai:kyutech.repo.nii.ac.jp:00006494","sets":["8:24"]},"author_link":["27360","799","27508","27358","27516","27366","27364","6646"],"item_21_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-08-29","bibliographicIssueDateType":"Issued"},"bibliographic_titles":[{"bibliographic_title":"2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)"}]}]},"item_21_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"We have designed and microfabricated millimeter-scale wing-shaped hybrid microstructures composed of rigid structures of single crystal silicon (SCS) and flexible polyimide (PI) membranes. The wing-shaped microstructures mimicking insect flapping flight have been designed using a fluid-structure interaction analysis, and have been microfabricated using microfabrication technologies with the SCS substrates coated with photosensitive polyimide membranes. The shape of the SCS parts of the hybrid microstructures have been fabricated using deep reactive ion etching (D-RIE) process. The flexible parts of PI membranes have been prepared using photolithography and the subsequent curing process of the micro-patterned photosensitive PI thin film. The wing-shaped hybrid microstructures fabricated have been observed, and the flexibility of the PI membrane part of the hybrid microstructures was also confirmed using the bending test of the PI membrane.","subitem_description_type":"Abstract"}]},"item_21_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), April 9-12, 2017, UCLA Meyer & Renee Luskin Conference Center, Los Angeles, California, USA","subitem_description_type":"Other"}]},"item_21_description_60":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Journal 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トモヨシ","nameLang":"ja-Kana"}]},{"nameIdentifiers":[{"nameIdentifier":"27366","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Ohira,  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Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works."}]},"item_21_select_59":{"attribute_name":"査読の有無","attribute_value_mlt":[{"subitem_select_item":"yes"}]},"item_21_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"2474-3755","subitem_source_identifier_type":"ISSN"}]},"item_21_text_28":{"attribute_name":"論文ID（連携）","attribute_value_mlt":[{"subitem_text_value":"10351416"}]},"item_21_text_36":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan"},{"subitem_text_value":"Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan"}]},"item_21_text_63":{"attribute_name":"連携ID","attribute_value_mlt":[{"subitem_text_value":"8210"}]},"item_21_version_type_58":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":""}]}],"creatorNames":[{"creatorName":"Murakami, Sunao","creatorNameLang":"en"},{"creatorName":"村上, 直","creatorNameLang":"ja"},{"creatorName":"ムラカミ, スナオ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{},{},{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[],"affiliationNames":[{"affiliationName":""}]}],"creatorNames":[{"creatorName":"Ishihara, Daisuke","creatorNameLang":"en"},{"creatorName":"石原, 大輔","creatorNameLang":"ja"},{"creatorName":"イシハラ, 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structure","subitem_subject_scheme":"Other"},{"subitem_subject":"silicon","subitem_subject_scheme":"Other"},{"subitem_subject":"polyimide","subitem_subject_scheme":"Other"},{"subitem_subject":"flexible membrane","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes"}]},"item_type_id":"21","owner":"3","path":["24"],"pubdate":{"attribute_name":"公開日","attribute_value":"2020-04-09"},"publish_date":"2020-04-09","publish_status":"0","recid":"6494","relation_version_is_last":true,"title":["Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-10-25T10:48:07.929203+00:00"}