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Theoretical Study on Self-calibration for the Wide-range Laser Auto-collimation Method
http://hdl.handle.net/10228/1118
http://hdl.handle.net/10228/1118147d8e2c-e3a1-487d-ba9d-66c4695debc3
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
Shimizu_1118.pdf (113.0 kB)
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| Item type | 学術雑誌論文 = Journal Article(1) | |||||||||||||
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| 公開日 | 2008-08-21 | |||||||||||||
| 資源タイプ | ||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||
| 資源タイプ | journal article | |||||||||||||
| タイトル | ||||||||||||||
| タイトル | Theoretical Study on Self-calibration for the Wide-range Laser Auto-collimation Method | |||||||||||||
| 言語 | en | |||||||||||||
| 言語 | ||||||||||||||
| 言語 | eng | |||||||||||||
| 著者 |
清水, 浩貴
× 清水, 浩貴
WEKO
3475
× Hayashi, Osamu |
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| 抄録 | ||||||||||||||
| 内容記述タイプ | Abstract | |||||||||||||
| 内容記述 | A wide-range laser auto-collimation method to measure the surface profiles of targets with steep slopes has been proposed. This method employs a deflecting optical system to enlarge the measurement range of the angle sensor. However, this optical system also changes the sensitivity property of the angle sensor. Therefore, we propose a new in-situ self-calibration method that includes the geometrical designed data of the target and can be applied to wide-range laser auto-collimation method. In the proposed method, the calibration sensitivities at each measurement point are obtained with two sets of measured data, which are acquired before and after performing minute rotation or translation with respect to the measured target, and the simulated shift of the normal angle at each point. The present paper describes the calibration procedure and specific calculation method used in the proposed method. | |||||||||||||
| 言語 | en | |||||||||||||
| 書誌情報 |
en : Key Engineering Materials 巻 381-382, p. 271-274, 発行日 2008-04-01 |
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| 出版社 | ||||||||||||||
| 出版者 | Trans Tech Publications | |||||||||||||
| 言語 | en | |||||||||||||
| DOI | ||||||||||||||
| 関連タイプ | isVersionOf | |||||||||||||
| 識別子タイプ | DOI | |||||||||||||
| 関連識別子 | https://doi.org/10.4028/www.scientific.net/KEM.381-382.271 | |||||||||||||
| ISSN | ||||||||||||||
| 収録物識別子タイプ | PISSN | |||||||||||||
| 収録物識別子 | 1013-9826 | |||||||||||||
| ISSN | ||||||||||||||
| 収録物識別子タイプ | EISSN | |||||||||||||
| 収録物識別子 | 1662-9795 | |||||||||||||
| 著作権関連情報 | ||||||||||||||
| 権利情報 | Copyright © 2008 Trans Tech Publications,Seitzerland | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Precision Metrology | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Profile Measurement | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Self-calibration | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Laser Auto-collimation | |||||||||||||
| キーワード | ||||||||||||||
| 主題Scheme | Other | |||||||||||||
| 主題 | Aspherical Surface | |||||||||||||
| 出版タイプ | ||||||||||||||
| 出版タイプ | AM | |||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||||
| 査読の有無 | ||||||||||||||
| 値 | yes | |||||||||||||
| 研究者情報 | ||||||||||||||
| URL | https://hyokadb02.jimu.kyutech.ac.jp/html/21_ja.html | |||||||||||||
| 連携ID | ||||||||||||||
| 値 | 52 | |||||||||||||
| 業績ID | ||||||||||||||
| 値 | 13451EF59767565349257498001B6011 | |||||||||||||
