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平行デュアルレーザビーム法によるシリコンウェーハのバルクキャリア寿命評価技術
http://hdl.handle.net/10228/00006157
http://hdl.handle.net/10228/0000615734257d17-f4a2-4a8c-abb4-711dbd3c271e
名前 / ファイル | ライセンス | アクション |
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nperc70.pdf (652.8 kB)
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Item type | 会議発表論文 = Conference Paper(1) | |||||||||||
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公開日 | 2017-04-27 | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||||||||
資源タイプ | conference paper | |||||||||||
タイトル | ||||||||||||
タイトル | 平行デュアルレーザビーム法によるシリコンウェーハのバルクキャリア寿命評価技術 | |||||||||||
その他のタイトル | ||||||||||||
その他のタイトル | Dual laser beam technique to evaluate bulk lifetime of free carriers in silicon wafers | |||||||||||
言語 | ||||||||||||
言語 | jpn | |||||||||||
著者 |
金田, 寛
× 金田, 寛× 大村, 一郎
WEKO
16176
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抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | A steady-state distribution of free carriers is generated in the silicon wafer by irradiating the 1064-nm YAG laser beam. By measuring the behavior of refraction of another infrared laser beam caused by the generated free carriers, we derive the distribution of the generated free carriers, to finally obtain the diffusion length and lifetime of the free carriers. | |||||||||||
備考 | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | 電子デバイス/半導体電力変換 合同研究会, 九州工業大学 戸畑キャンパス, 2016-11-14/2016-11-15 | |||||||||||
書誌情報 |
電子デバイス/半導体電力変換合同研究会 p. EDD-16-073, 発行日 2016-11-15 |
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出版社 | ||||||||||||
出版社 | 一般社団法人電気学会 | |||||||||||
著作権関連情報 | ||||||||||||
権利情報 | 一般社団法人電気学会 | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | パワーデバイス | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | シリコンウェーハ | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | 評価 | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | キャリアライフタイム | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | レーザー | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | 屈折 | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | キャリア濃度分布 | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | VoR | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||
査読の有無 | ||||||||||||
値 | no | |||||||||||
連携ID | ||||||||||||
6097 | ||||||||||||
著者別名 | ||||||||||||
姓名 | Kaneta, Hiroshi | |||||||||||
著者別名 | ||||||||||||
姓名 | Omura, Ichiro | |||||||||||
言語 | en | |||||||||||
姓名 | 大村, 一郎 | |||||||||||
言語 | ja | |||||||||||
姓名 | オオムラ, イチロウ | |||||||||||
言語 | ja-Kana |