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Oxygen annealing for deuterium doped indium tin oxide thin films
http://hdl.handle.net/10228/00006246
http://hdl.handle.net/10228/00006246989f9a75-69d9-4d80-aa1f-f6536b9c8c75
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
pss_208_4_829_833.pdf (743.5 kB)
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| アイテムタイプ | 学術雑誌論文 = Journal Article(1) | |||||
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| 公開日 | 2017-06-30 | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| タイトル | ||||||
| タイトル | Oxygen annealing for deuterium doped indium tin oxide thin films | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 著者 |
Okada, Koichi
× Okada, Koichi× 古曵, 重美× Luo, Suning× Kohno, Atsushi× Tajiri, Takayuki× Ishii, Satoshi× Sekiba, Daiichiro× Mitome, Masanori× Shoji, Fumiya |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Deuterium-doped indium tin oxide films, fabricated by dc plasma deposition in sputter gas consisting of deuterium and argon, were annealed at 300 °C for 40 min in flowing oxygen gas by using tubular gold image furnace. On oxygen annealing, the optical transparency of the film deposited at the gas pressure ratio of deuterium to argon of 3.6% increased from ≈30 to 60% at the wavelength of 600 nm, although that of the films deposited at the ratios of 1 and 1.5% slightly decreased from 88 to 80% and from 85 to 77%, respectively. The resistivity of the films at room temperature, ranged from 2 × 10−4 to 1.4 × 10−3 Ω cm corresponding to the gas pressure ratio from 1 to 3.6%, was almost the same before and after the annealing for each film. A change in morphology toward a smoother surface by the oxygen annealing was apparent especially for the film with the gas pressure ratio of 3.6%. Agglomeration of randomly oriented grains with diameters of <100–200 nm observed before the annealing disappeared on annealing. A smoother surface is responsible for higher transparency of the annealed films that contained densely populated hydroxyl bond before the annealing. Oxygen annealing at 300 °C enlarged the optical transmittance (left panel) but decreased the population of hydrogen-bonded oxygen (right panel) of the indium tin oxide thin film fabricated by dc plasma deposition in sputter gas containing deuterium of 3.6%. | |||||
| 言語 | en | |||||
| 書誌情報 |
en : Physica Status Solidi. A, Applications and Materials Science 巻 208, 号 4, p. 829-833, 発行日 2011-04-11 |
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| 出版社 | ||||||
| 出版者 | Wiley | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1002/pssa.201026493 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA12238581 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | EISSN | |||||
| 収録物識別子 | 1862-6319 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 1862-6300 | |||||
| 著作権関連情報 | ||||||
| 権利情報 | Copyright (c) 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | annealing | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | doping | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | indium tin oxide | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | optical transmittance spectra | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | photoelectron spectra | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | sputtering deposition | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 出版タイプ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
| 査読の有無 | ||||||
| 値 | yes | |||||
| 研究者情報 | ||||||
| URL | https://hyokadb02.jimu.kyutech.ac.jp/html/102_ja.html | |||||
| 論文ID（連携） | ||||||
| 値 | 10020167 | |||||
| 連携ID | ||||||
| 値 | 263 | |||||
