Study on Nanoparticle Movement using Multi-wavelength Evanescent Fields for Chemical Mechanical Polishing

Blattler,  Aran

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化学的機械的研磨における多波長エバネッセント光によるナノ粒子挙動観察法に関する研究

https://doi.org/10.18997/00008914

名前 / ファイル	ライセンス	アクション
jou_k_365.pdf (45.0 MB)

アイテムタイプ

学位論文 = Thesis or Dissertation(1)

公開日

2022-06-14

資源タイプ

資源タイプ識別子

http://purl.org/coar/resource_type/c_db06

資源タイプ

doctoral thesis

タイトル

Study on Nanoparticle Movement using Multi-wavelength Evanescent Fields for Chemical Mechanical Polishing

言語

タイトル

化学的機械的研磨における多波長エバネッセント光によるナノ粒子挙動観察法に関する研究

言語

eng

著者

Blattler, Aran

抄録

内容記述タイプ

Abstract

内容記述

In the wet semiconductor process, abrasive nanoparticles have been being widely used in the chemical mechanical polishing （CMP） process to polish a wafer surface for high planarization. During polishing, nanoparticles move with a high-speed three-dimensional （3D） position in the solution. In the 3D nanoparticle's moving positions, X and Y positions are parallel to the surface, which can be measured by general microscopy. However, Z is a perpendicular distance between the surface to the nanoparticle, which could not be measured by general microscopy without longitudinal scanning, which is our research challenge. To understand nanoparticle phenomena near-surface, we have proposed and developed the apparatus with real-time fast-motion tracking on optical multi-wavelength evanescent fields microscopy to measure the 3D motion of an individual nanoparticle in water without scanning. The proposed method could measure height Z in one shot, suitable for high-speed measurement. There were three main experiments performed in this thesis. The first experiment focuses on the verification of measurement in the z-direction. A piezoelectric actuator was employed to control the nanoparticle displacement in height Z. Standard polystyrene φ100 nm particles randomly adhered to a spherical tip connected with the piezoelectric actuator. The spherical tip was essentially made from an optical adhesive （n=1.348） with a refractive index close to the water to decrease the tip self's unnecessary signal during nanoparticle observation in the water. The proposed method could obtain the multi-wavelength scattering lights from the observed nanoparticles by an 8-bit color camera with higher than 50 frames per second recording to investigate the 3D nanoscale tracking. The X and Y positions of nanoparticles were determined by the centroid of the scattering light intensities. The height Z was determined from the logarithm ratios between the detected scattering light intensities of both wavelengths. The measurement repeatability of the absolute difference in height between nanoparticles could be measured less than ±16 nm by using the proposed method. The uncertainty measurement of height Z of nanoparticles was less than that of ± 17 nm （2σ from 400 measurements）. The penetration height measurability range was approximately 250 nm from the reference surface. In the second experiment, we have therefore developed an invisible nano-step pattern in water to verify the absolute distance Z of an individual nanoparticle. The invisible nano-step height in water is made from an optical adhesive with a refractive index of 1.348. The invisible nano-step height in various heights was approximately less than 100 nm on a glass surface. Polystyrene φ100 nm standard particles were used to adhere to the invisible nano-step height and glass surface in water to verify the absolute distance Z. As a result, the measurement uncertainty of the absolute distance Z of nanoparticles was approximately less than ±10 nm （2σ from 100 measurements）. The third experiment used polystyrene （PS） standard φ100 nm particles and gold （Au） standard φ50 nm particles to investigate our three-dimensional tracking method. The 3D tracking results of PS φ100 nm particles were used to analyze the nanoparticle diffusion in the water. As a result, we found that the diffusion rapidly decreased when the height Z of the nanoparticles was nearer to nanoparticle size D （Z < 100 nm）. Finally, the outcomes of this study can provide information explaining some of the phenomena during the nanoscale process on a surface （Z < 100 nm）, such as a wet semiconductor process.

言語

内容記述タイプ

TableOfContents

内容記述

1 Introduction||2 Fundamental theory||3 Development of apparatus||4 Relative height measurement||5 Absolute height measurement||6 Three-dimensional motion tracking||7 Conclusions

備考

内容記述タイプ

Other

内容記述

九州工業大学博士学位論文学位記番号: 情工博甲第365号学位授与年月日: 令和4年3月25日

キーワード

主題Scheme

Other

主題

Nanoparticle movement

キーワード

主題Scheme

Other

主題

Standard nanoparticle

キーワード

主題Scheme

Other

主題

Optical multi-wavelength

キーワード

主題Scheme

Other

主題

Evanescent field microscopy,

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主題Scheme

Other

主題

One-shot measurement

キーワード

主題Scheme

Other

主題

Chemical mechanical polishing

アドバイザー

鈴木, 恵友

学位授与番号

甲第365号

学位名

博士（情報工学）

学位授与年月日

2022-03-25

学位授与機関

学位授与機関識別子Scheme

kakenhi

学位授与機関識別子

17104

学位授与機関名

九州工業大学

学位授与年度

内容記述タイプ

Other

内容記述

令和3年度

出版タイプ

VoR

出版タイプResource

http://purl.org/coar/version/c_970fb48d4fbd8a85

アクセス権

open access

アクセス権URI

http://purl.org/coar/access_right/c_abf2

ID登録

10.18997/00008914

ID登録タイプ

JaLC

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化学的機械的研磨における多波長エバネッセント光によるナノ粒子挙動観察法に関する研究

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化学的機械的研磨における多波長エバネッセント光によるナノ粒子挙動観察法に関する研究

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