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Enhanced Conductivity of Zinc-oxide thin-films by Ion-Implantation of Hydrogen-atoms
http://hdl.handle.net/10228/1497
http://hdl.handle.net/10228/149733c90d7a-9357-4858-8151-769fae21f840
名前 / ファイル | ライセンス | アクション |
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kohiki_11.pdf (2.4 MB)
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Item type | 学術雑誌論文 = Journal Article(1) | |||||
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公開日 | 2009-02-20 | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Enhanced Conductivity of Zinc-oxide thin-films by Ion-Implantation of Hydrogen-atoms | |||||
言語 | ||||||
言語 | eng | |||||
著者 |
古曵, 重美
× 古曵, 重美× Nishitani, M× Wada, T× Hirao, T |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Enhancement of the conductivity of zinc oxide through doping with hydrogen atoms was examined by using ion implantation of highly resistive thin films deposited by rf magnetron sputtering at room temperature. With a doping of 1 X 10(17) atoms cm-2, the conductivity after annealing at 200-degrees-C in an N2 atmosphere at 1 atm rose from the initial 1 X 10(-7) OMEGA-1 cm-1 to 5.5 X 10(2) OMEGA-1 cm-1. | |||||
言語 | en | |||||
書誌情報 |
en : Applied Physics Letters 巻 64, 号 21, p. 2876-2878, 発行日 1994-05-23 |
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出版社 | ||||||
言語 | en | |||||
出版者 | American Institute of Physics | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.111401 | |||||
CRID | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | URI | |||||
関連識別子 | https://cir.nii.ac.jp/crid/1573668927396194560 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543431 | |||||
ISSN | ||||||
収録物識別子タイプ | EISSN | |||||
収録物識別子 | 1077-3118 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
著作権関連情報 | ||||||
権利情報 | Copyright © 1994 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | zinc oxides | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | thin films | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | electric conductivity | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ion implantation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | hydrogen | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | magnetron | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | sputtered materials | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ambient temperature | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
査読の有無 | ||||||
値 | yes | |||||
業績ID | ||||||
EBFA24656F48BA3549257561002017EC | ||||||
著者別名 |