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銅を拡散添加したシリコンウェーハーのX線回折固有反射半値幅の測定
http://hdl.handle.net/10228/4183
http://hdl.handle.net/10228/4183a52b75a5-1854-47a5-b500-3b54f2315028
名前 / ファイル | ライセンス | アクション |
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tech40_p167_175.pdf (2.1 MB)
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Item type | 紀要論文 = Departmental Bulletin Paper(1) | |||||||||
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公開日 | 2010-01-28 | |||||||||
資源タイプ | ||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
資源タイプ | departmental bulletin paper | |||||||||
タイトル | ||||||||||
言語 | ja | |||||||||
タイトル | 銅を拡散添加したシリコンウェーハーのX線回折固有反射半値幅の測定 | |||||||||
その他のタイトル | ||||||||||
その他のタイトル | X-Ray Measurements of Half-Widths of Intrinsic Rocking Curve of Copper-Doped Silicon Wafers by means of Double-Crystal Technique | |||||||||
言語 | en | |||||||||
言語 | ||||||||||
言語 | jpn | |||||||||
著者 |
近浦, 吉則
× 近浦, 吉則
× 山田, 啓義
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書誌情報 |
九州工業大学研究報告. 工学 en : Bulletin of the Kyushu Institute of Technology. Science and technology 号 40, p. 167-175, 発行日 1980-03-01 |
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出版者 | ||||||||||
出版者 | 九州工業大学 | |||||||||
ISSN | ||||||||||
収録物識別子タイプ | PISSN | |||||||||
収録物識別子 | 0453-0357 | |||||||||
版 | ||||||||||
出版タイプ | VoR | |||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
査読の有無 | ||||||||||
値 | no | |||||||||
著者別名 | ||||||||||
姓名 | Chikaura, Yoshinori | |||||||||
著者別名 | ||||||||||
姓名 | Yamada, Hiroyoshi |