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Fabrication and Evaluation of a Thermoelectric Microdevice on a Free-Standing Substrate
http://hdl.handle.net/10228/2428
http://hdl.handle.net/10228/2428d14cc65f-1bd8-4b69-9230-68623a118110
名前 / ファイル | ライセンス | アクション |
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JEMS-847.pdf (361.2 kB)
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Item type | 学術雑誌論文 = Journal Article(1) | |||||||||||
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公開日 | 2009-07-23 | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
タイトル | ||||||||||||
タイトル | Fabrication and Evaluation of a Thermoelectric Microdevice on a Free-Standing Substrate | |||||||||||
言語 | ||||||||||||
言語 | eng | |||||||||||
著者 |
Kurosaki, Jun-ichiro
× Kurosaki, Jun-ichiro× Yamamoto, Akihiro× Tanaka, Saburo× Cannon, James× 宮崎, 康次
WEKO
679
× 塚本, 寛 |
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抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | Using shadow masks prepared by standard microfabrication processes, wefabricated in-plane thermoelectric microdevices (4 mm 9 4 mm) made ofbismuth telluride thin films, and evaluated their performance. We usedBi0.4Te3.0Sb1.6 as the p-type semiconductor and Bi2.0Te2.7Se0.3 as the n-typesemiconductor. We deposited p- and n-type thermoelectric thin films on afree-standing thin film of Si3N4 (4 mm 9 4 mm 9 4 lm) on a Si wafer, andmeasured the output voltages of the microdevices while heating at the bottomof the Si substrate. The maximum output voltage of the thermoelectric devicewas 48 mV at 373 K. | |||||||||||
書誌情報 |
Journal of Electronic Materials 巻 38, 号 7, p. 1326-1330, 発行日 2009-07 |
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出版社 | ||||||||||||
出版者 | Springer / The Minerals Metals & Materials Society | |||||||||||
DOI | ||||||||||||
関連タイプ | isVersionOf | |||||||||||
識別子タイプ | DOI | |||||||||||
関連識別子 | https://doi.org/10.1007/s11664-009-0819-y | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | ISSN | |||||||||||
収録物識別子 | 0361-5235 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | ISSN | |||||||||||
収録物識別子 | 1543-186X | |||||||||||
著作権関連情報 | ||||||||||||
権利情報 | The original publication is available at www.springerlink.com | |||||||||||
著作権関連情報 | ||||||||||||
権利情報 | ©2009 TMS | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | 熱電発電 | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | MEMS | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Thermoelectricity | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Micro-device | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Bismuth telluride | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Waste heat recovery | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | AM | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||
査読の有無 | ||||||||||||
値 | yes | |||||||||||
研究者情報 | ||||||||||||
https://hyokadb02.jimu.kyutech.ac.jp/html/26_ja.html | ||||||||||||
連携ID | ||||||||||||
56 | ||||||||||||
業績ID | ||||||||||||
F67E0C452DA122EF492575F3003302B7 |