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Effects of hydrogen in working gas for sputter-deposition on surface morphology and microstructure of indium tin oxide thin films grown at room temperature
http://hdl.handle.net/10228/00006432
http://hdl.handle.net/10228/0000643294d533fe-d9a2-4ad0-a9ed-4bf7995191a6
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
ml_63_27.pdf (670.0 kB)
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| Item type | 学術雑誌論文 = Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-11-15 | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| タイトル | ||||||
| タイトル | Effects of hydrogen in working gas for sputter-deposition on surface morphology and microstructure of indium tin oxide thin films grown at room temperature | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 著者 |
Luo, Suning
× Luo, Suning× 古曵, 重美× Okada, Koichi× Mitome, Masanori× Shoji, Fumiya |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Surface morphology and microstructure of indium tin oxide (ITO) thin films sputter deposited without heat treatment were obviously different from each other depending on the hydrogen concentration [H] in the working gas. The film surface became smoother with increasing [H] to 1%, but nucleation and growth of grains were apparent above [H] = 1.5%. The width of columnar grains in the ≤200 nm-thick films narrowed from ≈100 nm to ≈50 nm with increasing [H] from 0% to 1.5%. Randomly oriented and agglomerated grains were observed for the film deposited with [H] = 3.6%. Hydrogen added to the working gas induced reduction of the grain size, and then resulted in lowering of the carrier mobility. | |||||
| 書誌情報 |
Materials Letters 巻 63, 号 27, p. 2365-2368, 発行日 2009-11-15 |
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| 出版社 | ||||||
| 出版者 | Elsevier | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1016/j.matlet.2009.08.010 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA11537623 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0167-577X | |||||
| 著作権関連情報 | ||||||
| 権利情報 | Elsevier | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Surface morphology | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Microstructure | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Indium tin oxide | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Hydrogen | |||||
| 出版タイプ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
| 査読の有無 | ||||||
| 値 | yes | |||||
| 研究者情報 | ||||||
| URL | https://hyokadb02.jimu.kyutech.ac.jp/html/102_ja.html | |||||
| 論文ID（連携） | ||||||
| 値 | 10020174 | |||||
| 連携ID | ||||||
| 値 | 268 | |||||
| 情報源 | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1016/j.matlet.2009.08.010 | |||||
| 関連名称 | https://doi.org/10.1016/j.matlet.2009.08.010 | |||||
