WEKO3
アイテム
{"_buckets": {"deposit": "ab00d6ed-3eec-4660-b600-50aeaaae5dac"}, "_deposit": {"created_by": 3, "id": "5249", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "5249"}, "status": "published"}, "_oai": {"id": "oai:kyutech.repo.nii.ac.jp:00005249", "sets": ["24"]}, "author_link": ["7315", "21135", "27551", "6794", "21134"], "item_21_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2013-02-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "1410", "bibliographicPageEnd": "194", "bibliographicPageStart": "187", "bibliographicVolumeNumber": "121", "bibliographic_titles": [{"bibliographic_title": "Journal of the Ceramic Society of Japan"}]}]}, "item_21_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface.", "subitem_description_type": "Abstract"}]}, "item_21_description_60": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"subitem_description": "Journal Article", "subitem_description_type": "Other"}]}, "item_21_link_62": {"attribute_name": "研究者情報", "attribute_value_mlt": [{"subitem_link_text": "https://hyokadb02.jimu.kyutech.ac.jp/html/98_ja.html", "subitem_link_url": "https://hyokadb02.jimu.kyutech.ac.jp/html/98_ja.html"}]}, "item_21_publisher_7": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "社団法人日本セラミックス協会"}]}, "item_21_relation_12": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.2109/jcersj2.121.187", "subitem_relation_type_select": "DOI"}}]}, "item_21_rights_13": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (c) 2013 The Ceramic Society of Japan"}]}, "item_21_select_59": {"attribute_name": "査読の有無", "attribute_value_mlt": [{"subitem_select_item": "yes"}]}, "item_21_source_id_10": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA12229489", "subitem_source_identifier_type": "NCID"}]}, "item_21_source_id_8": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "1348-6535", "subitem_source_identifier_type": "ISSN"}, {"subitem_source_identifier": "1882-0743", "subitem_source_identifier_type": "ISSN"}]}, "item_21_text_28": {"attribute_name": "論文ID(連携)", "attribute_value_mlt": [{"subitem_text_value": "10254905"}]}, "item_21_text_36": {"attribute_name": "著者所属", "attribute_value_mlt": [{"subitem_text_value": "Department of Applied Chemistry, Faculty of Engineering, Kyushu Institute of Technology"}, {"subitem_text_value": "Department of Applied Chemistry, Faculty of Engineering, Kyushu Institute of Technology"}, {"subitem_text_value": "Department of Applied Chemistry, Faculty of Engineering, Kyushu Institute of Technology"}, {"subitem_text_value": "Department of Applied Chemistry, Faculty of Engineering, Kyushu Institute of Technology"}, {"subitem_text_value": "Department of Applied Chemistry, Faculty of Engineering, Kyushu Institute of Technology"}]}, "item_21_text_63": {"attribute_name": "連携ID", "attribute_value_mlt": [{"subitem_text_value": "6359"}]}, "item_21_version_type_58": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorAffiliations": [{"affiliationNameIdentifiers": [], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Tsubota, Toshiki", "creatorNameLang": "en"}, {"creatorName": "坪田, 敏樹", "creatorNameLang": "ja"}, {"creatorName": "ツボタ, トシキ", "creatorNameLang": "ja-Kana"}], "familyNames": [{"familyName": "Tsubota", "familyNameLang": "en"}, {"familyName": "坪田", "familyNameLang": "ja"}, {"familyName": "ツボタ", "familyNameLang": "ja-Kana"}], "givenNames": [{"givenName": "Toshiki", "givenNameLang": "en"}, {"givenName": "敏樹", "givenNameLang": "ja"}, {"givenName": "トシキ", "givenNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "7315", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "10304750", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://nrid.nii.ac.jp/ja/nrid/1000010304750"}, {"nameIdentifier": "7005481699", "nameIdentifierScheme": "Scopus著者ID", "nameIdentifierURI": "https://www.scopus.com/authid/detail.uri?authorId=7005481699"}, {"nameIdentifier": "109", "nameIdentifierScheme": "九工大研究者情報", "nameIdentifierURI": "https://hyokadb02.jimu.kyutech.ac.jp/html/109_ja.html"}]}, {"creatorNames": [{"creatorName": "Amano, Hiroshi"}], "nameIdentifiers": [{"nameIdentifier": "21134", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kojo, Taiki"}], "nameIdentifiers": [{"nameIdentifier": "21135", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Murakami, Naoya", "creatorNameLang": "en"}, {"creatorName": "村上, 直也", "creatorNameLang": "ja"}, {"creatorName": "ムラカミ, ナオヤ", "creatorNameLang": "ja-Kana"}], "familyNames": [{"familyName": "Murakami", "familyNameLang": "en"}, {"familyName": "村上", "familyNameLang": "ja"}, {"familyName": "ムラカミ", "familyNameLang": "ja-Kana"}], "givenNames": [{"givenName": "Naoya", "givenNameLang": "en"}, {"givenName": "直也", "givenNameLang": "ja"}, {"givenName": "ナオヤ", "givenNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "27551", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "10452822", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://nrid.nii.ac.jp/ja/nrid/1000010452822"}, {"nameIdentifier": "35756238700", "nameIdentifierScheme": "Scopus著者ID", "nameIdentifierURI": "https://www.scopus.com/authid/detail.uri?authorId=35756238700"}, {"nameIdentifier": "0000-0003-2444-8603", "nameIdentifierScheme": "ORCiD", "nameIdentifierURI": "https://orcid.org/0000-0003-2444-8603"}, {"nameIdentifier": "124", "nameIdentifierScheme": "九工大研究者情報", "nameIdentifierURI": "https://hyokadb02.jimu.kyutech.ac.jp/html/124_ja.html"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Ohno, Teruhisa", "creatorNameLang": "en"}, {"creatorName": "横野, 照尚", "creatorNameLang": "ja"}, {"creatorName": "オウノ, テルヒサ", "creatorNameLang": "ja-Kana"}], "familyNames": [{"familyName": "Ohno", "familyNameLang": "en"}, {"familyName": "横野", "familyNameLang": "ja"}, {"familyName": "オウノ", "familyNameLang": "ja-Kana"}], "givenNames": [{"givenName": "Teruhisa", "givenNameLang": "en"}, {"givenName": "照尚", "givenNameLang": "ja"}, {"givenName": "テルヒサ", "givenNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "6794", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "10203887", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://nrid.nii.ac.jp/ja/nrid/1000010203887"}, {"nameIdentifier": "7402659316", "nameIdentifierScheme": "Scopus著者ID", "nameIdentifierURI": "https://www.scopus.com/authid/detail.uri?authorId=7402659316"}, {"nameIdentifier": "0000-0002-7825-8189", "nameIdentifierScheme": "ORCiD", "nameIdentifierURI": "https://orcid.org/0000-0002-7825-8189"}, {"nameIdentifier": "98", "nameIdentifierScheme": "九工大研究者情報", "nameIdentifierURI": "https://hyokadb02.jimu.kyutech.ac.jp/html/98_ja.html"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-12-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JCSJ121_187.pdf", "filesize": [{"value": "5.8 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 5800000.0, "url": {"label": "JCSJ121_187.pdf", "url": "https://kyutech.repo.nii.ac.jp/record/5249/files/JCSJ121_187.pdf"}, "version_id": "f7ebf626-dd10-41f3-ac2c-f91598b8fcce"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "CVD diamond", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Ultrananocrystalline diamon", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Hot filament CVD", "subitem_subject_scheme": "Other"}, {"subitem_subject": "BeCu allo", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Electrically conductive diamond", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD"}]}, "item_type_id": "21", "owner": "3", "path": ["24"], "permalink_uri": "http://hdl.handle.net/10228/00006460", "pubdate": {"attribute_name": "公開日", "attribute_value": "2017-12-19"}, "publish_date": "2017-12-19", "publish_status": "0", "recid": "5249", "relation": {}, "relation_version_is_last": true, "title": ["Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD"], "weko_shared_id": 3}
Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD
名前 / ファイル | ライセンス | アクション |
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JCSJ121_187.pdf (5.8 MB)
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Item type | 学術雑誌論文 = Journal Article(1) | |||||||||||||||||||||||
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公開日 | 2017-12-19 | |||||||||||||||||||||||
資源タイプ | ||||||||||||||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||||||||
資源タイプ | journal article | |||||||||||||||||||||||
タイトル | ||||||||||||||||||||||||
タイトル | Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD | |||||||||||||||||||||||
言語 | ||||||||||||||||||||||||
言語 | eng | |||||||||||||||||||||||
著者 |
坪田, 敏樹
× 坪田, 敏樹
WEKO
7315
× Amano, Hiroshi× Kojo, Taiki× 村上, 直也
WEKO
27551
× 横野, 照尚
WEKO
6794
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抄録 | ||||||||||||||||||||||||
内容記述タイプ | Abstract | |||||||||||||||||||||||
内容記述 | Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface. | |||||||||||||||||||||||
書誌情報 |
Journal of the Ceramic Society of Japan 巻 121, 号 1410, p. 187-194, 発行日 2013-02-01 |
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出版者 | 社団法人日本セラミックス協会 | |||||||||||||||||||||||
DOI | ||||||||||||||||||||||||
関連タイプ | isIdenticalTo | |||||||||||||||||||||||
識別子タイプ | DOI | |||||||||||||||||||||||
関連識別子 | https://doi.org/10.2109/jcersj2.121.187 | |||||||||||||||||||||||
NCID | ||||||||||||||||||||||||
収録物識別子タイプ | NCID | |||||||||||||||||||||||
収録物識別子 | AA12229489 | |||||||||||||||||||||||
ISSN | ||||||||||||||||||||||||
収録物識別子タイプ | ISSN | |||||||||||||||||||||||
収録物識別子 | 1348-6535 | |||||||||||||||||||||||
ISSN | ||||||||||||||||||||||||
収録物識別子タイプ | ISSN | |||||||||||||||||||||||
収録物識別子 | 1882-0743 | |||||||||||||||||||||||
著作権関連情報 | ||||||||||||||||||||||||
権利情報 | Copyright (c) 2013 The Ceramic Society of Japan | |||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||
主題 | CVD diamond | |||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||
主題 | Ultrananocrystalline diamon | |||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||
主題 | Hot filament CVD | |||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||
主題 | BeCu allo | |||||||||||||||||||||||
キーワード | ||||||||||||||||||||||||
主題Scheme | Other | |||||||||||||||||||||||
主題 | Electrically conductive diamond | |||||||||||||||||||||||
出版タイプ | ||||||||||||||||||||||||
出版タイプ | VoR | |||||||||||||||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||||||||
査読の有無 | ||||||||||||||||||||||||
値 | yes | |||||||||||||||||||||||
研究者情報 | ||||||||||||||||||||||||
https://hyokadb02.jimu.kyutech.ac.jp/html/98_ja.html | ||||||||||||||||||||||||
論文ID(連携) | ||||||||||||||||||||||||
10254905 | ||||||||||||||||||||||||
連携ID | ||||||||||||||||||||||||
6359 |