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Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 = Journal Article(1) | |||||||||||
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公開日 | 2020-04-09 | |||||||||||
タイトル | ||||||||||||
タイトル | Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes | |||||||||||
言語 | ||||||||||||
言語 | eng | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
著者 |
Murakami, Sunao
× Murakami, Sunao
WEKO
27508
× Ishihara, Daisuke
WEKO
6646
× Araki, Masateru× Horie, Tomoyoshi
WEKO
799
× Ohira, Naoto× Ito, Takahiro |
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抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | We have designed and microfabricated millimeter-scale wing-shaped hybrid microstructures composed of rigid structures of single crystal silicon (SCS) and flexible polyimide (PI) membranes. The wing-shaped microstructures mimicking insect flapping flight have been designed using a fluid-structure interaction analysis, and have been microfabricated using microfabrication technologies with the SCS substrates coated with photosensitive polyimide membranes. The shape of the SCS parts of the hybrid microstructures have been fabricated using deep reactive ion etching (D-RIE) process. The flexible parts of PI membranes have been prepared using photolithography and the subsequent curing process of the micro-patterned photosensitive PI thin film. The wing-shaped hybrid microstructures fabricated have been observed, and the flexibility of the PI membrane part of the hybrid microstructures was also confirmed using the bending test of the PI membrane. | |||||||||||
内容記述 | ||||||||||||
内容記述タイプ | Other | |||||||||||
内容記述 | 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), April 9-12, 2017, UCLA Meyer & Renee Luskin Conference Center, Los Angeles, California, USA | |||||||||||
書誌情報 |
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 発行日 2017-08-29 |
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出版者 | ||||||||||||
出版者 | IEEE | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | ISSN | |||||||||||
収録物識別子 | 2474-3755 | |||||||||||
ISBN | ||||||||||||
識別子タイプ | ISBN | |||||||||||
関連識別子 | 978-1-5090-3059-0 | |||||||||||
ISBN | ||||||||||||
識別子タイプ | ISBN | |||||||||||
関連識別子 | 978-1-5090-3058-3 | |||||||||||
ISBN | ||||||||||||
識別子タイプ | ISBN | |||||||||||
関連識別子 | 978-1-5090-3060-6 | |||||||||||
DOI | ||||||||||||
関連タイプ | isVersionOf | |||||||||||
識別子タイプ | DOI | |||||||||||
関連識別子 | info:doi/10.1109/NEMS.2017.8017145 | |||||||||||
情報源 | ||||||||||||
識別子タイプ | URI | |||||||||||
関連識別子 | DOI: 10.1109/NEMS.2017.8017145 | |||||||||||
関連名称 | DOI: 10.1109/NEMS.2017.8017145 | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | microfabrication | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | hydrid structure | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | silicon | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | polyimide | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | flexible membrane | |||||||||||
権利 | ||||||||||||
権利情報 | Copyright (c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |||||||||||
版 | ||||||||||||
出版タイプ | AM | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||
査読の有無 | ||||||||||||
値 | yes | |||||||||||
研究者情報 | ||||||||||||
https://hyokadb02.jimu.kyutech.ac.jp/html/255_ja.html | ||||||||||||
連携ID | ||||||||||||
8210 |