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Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments
http://hdl.handle.net/10228/00006433
http://hdl.handle.net/10228/000064336428c140-12dd-47d9-821e-55744ea8597d
名前 / ファイル | ライセンス | アクション |
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ml_63_6_7.pdf (370.4 kB)
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Item type | 学術雑誌論文 = Journal Article(1) | |||||||||||
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公開日 | 2017-11-15 | |||||||||||
資源タイプ | ||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||
資源タイプ | journal article | |||||||||||
タイトル | ||||||||||||
タイトル | Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments | |||||||||||
言語 | ||||||||||||
言語 | eng | |||||||||||
著者 |
Luo, Suning
× Luo, Suning× Okada, Koichi× 古曵, 重美× Tsutsui, Fuki× 下岡, 弘和
WEKO
1489
× Shoji, Fumiya |
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抄録 | ||||||||||||
内容記述タイプ | Abstract | |||||||||||
内容記述 | Polycrystalline thin films of indium tin oxide sputter-deposited in the working gas containing hydrogen of 0.3–1.5% exhibited transmittance of ≥ 80% for visible lights and blue-shift of ≥ 0.1 eV in the optical absorption energy. The film deposited in the gas containing hydrogen of 1% demonstrated almost flat temperature-dependent resistivity and the lowest resistivity of ≈ 1.5 × 10− 4 Ω cm at room temperature. The carrier density showed an inverse V-shaped behavior with the maximum at the hydrogen concentration of 1%. The mobility stayed at almost constant below the hydrogen concentration of 1% and dropped rather rapidly above 1%. | |||||||||||
書誌情報 |
Materials Letters 巻 63, 号 6-7, p. 641-643, 発行日 2009-03-15 |
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出版社 | ||||||||||||
出版者 | Elsevier | |||||||||||
DOI | ||||||||||||
関連タイプ | isVersionOf | |||||||||||
識別子タイプ | DOI | |||||||||||
関連識別子 | info:doi/10.1016/j.matlet.2008.12.008 | |||||||||||
NCID | ||||||||||||
収録物識別子タイプ | NCID | |||||||||||
収録物識別子 | AA11537623 | |||||||||||
ISSN | ||||||||||||
収録物識別子タイプ | ISSN | |||||||||||
収録物識別子 | 0167-577X | |||||||||||
著作権関連情報 | ||||||||||||
権利情報 | Elsevier | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Hydrogen | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Indium tin oxide | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Optical transmittance | |||||||||||
キーワード | ||||||||||||
主題Scheme | Other | |||||||||||
主題 | Carrier transport | |||||||||||
出版タイプ | ||||||||||||
出版タイプ | AM | |||||||||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||||
査読の有無 | ||||||||||||
値 | yes | |||||||||||
研究者情報 | ||||||||||||
https://hyokadb02.jimu.kyutech.ac.jp/html/102_ja.html | ||||||||||||
論文ID(連携) | ||||||||||||
10020175 | ||||||||||||
連携ID | ||||||||||||
269 | ||||||||||||
情報源 | ||||||||||||
識別子タイプ | DOI | |||||||||||
関連識別子 | https://doi.org/10.1016/j.matlet.2008.12.008 |