{"_buckets": {"deposit": "27f1792a-be15-4afc-9b85-292324fb4b02"}, "_deposit": {"created_by": 3, "id": "909", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "909"}, "status": "published"}, "_oai": {"id": "oai:kyutech.repo.nii.ac.jp:00000909", "sets": ["23"]}, "author_link": ["19009"], "item_20_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2008-06-30", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "105", "bibliographicPageStart": "103", "bibliographicVolumeNumber": "18", "bibliographic_titles": [{}]}]}, "item_20_degree_grantor_59": {"attribute_name": "学位授与機関", "attribute_value_mlt": [{"subitem_degreegrantor": [{"subitem_degreegrantor_name": "九州工業大学"}]}]}, "item_20_description_5": {"attribute_name": "内容記述", "attribute_value_mlt": [{"subitem_description": "九州工業大学博士学位論文（要旨） 学位記番号:生工博甲第72号 学位授与年月日:平成20年3月25日", "subitem_description_type": "Other"}]}, "item_20_description_65": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"subitem_description": "Thesis or Dissertation", "subitem_description_type": "Other"}]}, "item_20_dissertation_number_62": {"attribute_name": "学位授与番号", "attribute_value_mlt": [{"subitem_dissertationnumber": "17104甲生工第72号"}]}, "item_20_publisher_31": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "九州工業大学"}]}, "item_20_select_64": {"attribute_name": "査読の有無", "attribute_value_mlt": [{"subitem_select_item": "yes"}]}, "item_20_text_37": {"attribute_name": "著者所属", "attribute_value_mlt": [{"subitem_text_value": "九州工業大学大学院生命体工学研究科"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "松中, 繁樹"}], "nameIdentifiers": [{"nameIdentifier": "19009", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2009-02-17"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "sei_kou_72.pdf", "filesize": [{"value": "1.1 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1100000.0, "url": {"label": "sei_kou_72.pdf", "url": "https://kyutech.repo.nii.ac.jp/record/909/files/sei_kou_72.pdf"}, "version_id": "fb43f83e-5cc6-41ec-9967-35ac7f4fe1d8"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "thesis", "resourceuri": "http://purl.org/coar/resource_type/c_46ec"}]}, "item_title": "イオン化スパッタ法による微細金属配線成膜に関する研究", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "イオン化スパッタ法による微細金属配線成膜に関する研究"}]}, "item_type_id": "20", "owner": "3", "path": ["23"], "permalink_uri": "http://hdl.handle.net/10228/1327", "pubdate": {"attribute_name": "公開日", "attribute_value": "2009-02-17"}, "publish_date": "2009-02-17", "publish_status": "0", "recid": "909", "relation": {}, "relation_version_is_last": true, "title": ["イオン化スパッタ法による微細金属配線成膜に関する研究"], "weko_shared_id": -1}